Semiconductor device and method for low resistive thin film resistor interconnect
View Patent ↗The invention relates to a semiconductor device and a method of manufacturing an electronic device. A first conductive layer (first metal interconnect layer) is deposited. There is an insulating layer (first intermetal dielectric) layer deposited. A resistive layer is deposited on top of the insulating layer and structured in order to serve as a thin film resistor. A second insulating layer (second intermetal dielectric) is then deposited on top of the resistive layer. A first opening is etched into the insulating layers (first and second intermetal dielectric) down to the first conductive layer. A second opening is etched into the insulating layers (first and second intermetal dielectrics) down to the first conductive layer. A cross-sectional plane of the second opening is arranged such that it at least partially overlaps the resistive layer of the thin film resistor in a first direction.
1. A method of manufacturing an electronic device, the method comprising:
depositing a first conductive layer;
depositing a first intermetal dielectric layer on top of the first conductive layer;
depositing a resistive layer and structuring the resistive layer for a thin film resistor;
depositing a second intermetal dielectric layer on top of the resistive layer;
etching a first VIA opening into the second intermetal dielectric and the first intermetal dielectric layer down to the first conductive layer;
etching a second opening into the second intermetal dielectric and the first intermetal dielectric layer down to the first conductive layer, wherein a horizontal cross-sectional plane of the second opening partially overlaps the resistive layer of the thin film resistor in a first dimension and wherein the first VIA opening does not overlap the resistive layer,
depositing a conductive material in the second opening so as to electrically couple the resistive layer of the thin film resistor and the first conductive layer,
depositing a second conductive layer on top of the second dielectric layer, and
electrically connecting the second conductive layer with the conductive material in the second opening.
2. The method according to claim 1 , further comprising structuring the resistive layer of the thin film resistor in a substantially rectangular shape and arranging the second opening such that the partial overlap of the horizontal cross-sectional plane of the second opening extends beyond a circumferential outer edge of the resistive layer of the thin film resistor at three sides.
3. The method according to claim 1 , wherein the same dry etching process and step is used for etching the first and the second opening.
4. The method according to claim 1 , wherein the partial overlap of the horizontal cross-sectional plane of the second opening over the resistive layer in the first dimension is between 0.2 μm and 0.4 μm.
5. The method of according to claim 1 , further comprising depositing the conductive material in the first opening so that the second conductive layer is electrically connected to the first conductive layer through the conductive material in first opening and the second opening and the conductive material in the second opening electrically connects the thin film resistor to the first conductive layer and the second conductive layer.
6. A method of manufacturing an electronic device, the method comprising:
depositing a first metal layer;
depositing a first intermetal dielectric layer on top of the first metal layer;
depositing a resistive layer and structuring the resistive layer for a thin film resistor;
depositing a second intermetal dielectric layer on top of the resistive layer;
etching a first VIA opening into the second intermetal dielectric and the first intermetal dielectric layer down to the first metal layer;
etching a second opening into the second intermetal dielectric and the first intermetal dielectric layer down to the first metal layer, wherein a horizontal cross-sectional plane of the second opening partially overlaps the resistive layer of the thin film resistor in a first dimension and wherein the first VIA opening does not overlap the resistive layer,
depositing a conductive material in the second opening so as to electrically couple the resistive layer of the thin film resistor and the first metal layer,
depositing a second metal layer on top of the second intermetal dielectric layer, and
electrically connecting the second metal layer with the conductive material in the second opening.
7. The method according to claim 6 , further comprising structuring the resistive layer of the thin film resistor in a substantially rectangular shape and arranging the second opening such that the partial overlap of the horizontal cross-sectional plane of the second opening extends beyond a circumferential outer edge of the resistive layer of the thin film resistor at three sides.
8. The method according to claim 6 , wherein the same dry etching process and step is used for etching the first and the second opening.
9. The method according to claim 6 , wherein the partial overlap of the horizontal cross-sectional plane of the second opening over the resistive layer in the first dimension is between 0.2 μm and 0.4 μm.
10. The method of according to claim 6 , further comprising depositing the conductive material in the first opening so that the second metal layer is electrically connected to the first metal layer through the conductive material in first opening and the second opening and the conductive material in the second opening electrically connects the thin film resistor to the first metal layer and the second metal layer.