Programmable fuse
View Patent ↗According to one exemplary embodiment, a method for forming a one-time programmable metal fuse structure includes forming a metal fuse structure over a substrate, the metal fuse structure including a gate metal segment situated between a dielectric segment and a polysilicon segment, a gate metal fuse being formed in a portion of the gate metal segment. The method further includes doping the polysilicon segment so as to form first and second doped polysilicon portions separated by an undoped polysilicon portion where, in one embodiment, the gate metal fuse is substantially co-extensive with the undoped polysilicon portion. The method can further include forming a first silicide segment on the first doped polysilicon portion and a second silicide segment on the second doped polysilicon portion, where the first and second silicide segments form respective terminals of the one-time programmable metal fuse structure.
1. A programmable metal fuse comprising:
a gate metal segment disposed over a substrate;
a polysilicon segment over said gate metal segment, said polysilicon segment comprising an undoped polysilicon portion situated adjacent to a doped polysilicon portion.
2. The programmable metal fuse of claim 1 , wherein said metal fuse is situated directly below said undoped polysilicon portion.
3. The programmable metal fuse of claim 1 , wherein said metal fuse is substantially co-extensive with said undoped polysilicon portion.
4. The programmable metal fuse of claim 1 , wherein said metal fuse is situated between a dielectric segment and said polysilicon segment.
5. The programmable metal fuse of claim 4 , wherein said dielectric segment comprises a high-k dielectric material.
6. The programmable metal fuse of claim 5 , wherein said high-k dielectric material is selected from the group consisting of hafnium oxide and zirconium oxide.
7. The programmable metal fuse of claim 1 further comprising a silicide segment situated over said doped polysilicon portion, wherein said silicide segment forms a terminal of said metal fuse.
8. The programmable metal fuse of claim 1 , wherein said metal fuse has a thickness of between approximately 30.0 Angstroms and approximately 200.0 Angstroms.
9. The programmable metal fuse of claim 1 , wherein said metal fuse has a width of less than approximately 40.0 nanometers.
10. The programmable metal fuse of claim 1 , wherein said metal fuse comprises a metal selected from the group consisting of titanium nitride and tantalum nitride.