Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
View Patent ↗A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.
1. A patterning slit sheet assembly for depositing a thin film in a desired pattern on a substrate, the patterning slit sheet assembly comprising:
a patterning slit sheet having a plurality of slits corresponding to the desired pattern;
a frame combined with the patterning slit sheet to support the patterning slit sheet; and
a support unit comprising an upper member configured to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet, a lower member disposed more apart from the patterning slit sheet than the upper member, and a plurality of middle members, each of the plurality of middle members being separated from any other of the plurality of middle members by a distance, wherein the upper member is configured to be fixed or moved upward and downward on the lower member via the plurality of middle members.
2. The patterning slit sheet assembly of claim 1 , wherein the upper and lower members extend to cross the plurality of slits.
3. The patterning slit sheet assembly of claim 1 , wherein, after the patterning slit sheet is combined with the frame, the upper member is configured to be moved toward the patterning slit sheet to support the patterning slit sheet and is then configured to be fixedly disposed on the lower member.
4. The patterning slit sheet assembly of claim 1 ,
wherein each of the plurality of middle members is disposed on a surface of the upper member facing the lower member, and is formed to pass through the lower member.
5. The patterning slit sheet assembly of claim 4 , wherein a fixed member is disposed at an end of the middle member facing in a direction opposite to another end of the middle member facing the upper member, and
the upper member is configured to be fixed on the lower member by combining the middle member with the lower member by using the fixed member, after the patterning slit sheet is combined with the frame and the upper member is moved toward the patterning slit sheet.
6. The patterning slit sheet assembly of claim 1 , wherein the support unit further comprises a connection member,
wherein the connection member is connected to the frame.
7. The patterning slit sheet assembly of claim 6 , wherein the connection member is fixed on the frame via an engaging member.