Supporting membranes on nanometer-scale self-assembled films
View Patent ↗Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well.
1. A structure, comprising:
a plurality of lamellae-shaped nanostructures extending upwardly from a substrate;
a porous membrane extending across upper ends of the plurality of nanostructures; and
a non-porous film above the porous membrane, the non-porous film being a continuous film extending along all portions of the porous membrane for preventing material from passing through the porous membrane.
2. The structure as recited in claim 1 , wherein the nanostructures are oriented in a nonrandom pattern.
3. The structure as recited in claim 1 , further comprising a plurality of second nanostructures formed above the non-porous film, and a second porous membrane extending across upper ends of the plurality of second nanostructures.
4. The structure as recited in claim 3 , further comprising a plurality of third nanostructures formed above the second porous membrane, and a third porous membrane extending across upper ends of the plurality of third nanostructures.
5. The structure as recited in claim 1 , wherein an average width of the nanostructures is less than about 50 nm in a critical dimension thereof, wherein an average pitch of the plurality of nanostructures is within about 1.5 to about 3 times the average width in the critical dimension.
6. The structure as recited in claim 1 , wherein the nanostructures have an aspect ratio of thickness to width in a critical dimension of between about 0.5:1 and about 5:1.
7. The structure as recited in claim 1 , wherein the nanostructures are comprised of a block polymer film.
8. The structure as recited in claim 3 , further comprising a surface modification layer between the non-porous film and the second nano structures.
9. The structure as recited in claim 8 , further comprising an etch stop layer positioned between the substrate and the lamellae-shaped nanostructures.
10. The structure as recited in claim 1 , further comprising an etch stop layer positioned between the substrate and the nanostructures.
11. A structure, comprising:
a plurality of nanostructures extending upwardly from a substrate;
a porous membrane extending across upper ends of the plurality of nanostructures; and
a non-porous film above the porous membrane, the non-porous film being a continuous film extending along all portions of the porous membrane for preventing material from passing through the porous membrane.
12. The structure as recited in claim 11 , further comprising a plurality of second nanostructures formed above the non-porous film, and a second porous membrane extending across upper ends of the plurality of second nanostructures.
13. The structure as recited in claim 12 , further comprising a surface modification layer between the non-porous film and the second nanostructures.
14. The structure as recited in claim 12 , wherein the first and second nanostructures are lamellar-shaped, wherein longitudinal axes of the second nanostructures are oriented about perpendicular to longitudinal axes of the first nanostructures.
15. The structure as recited in claim 11 , further comprising an etch stop layer positioned between the substrate and the nanostructures.
16. The structure as recited in claim 11 , wherein an average width of the nanostructures is less than about 50 nm in a critical dimension thereof, wherein an average pitch of the plurality of nanostructures is within about 1.5 to about 3 times the average width in the critical dimension.
17. The structure as recited in claim 11 , wherein the nanostructures have an aspect ratio of thickness to width in a critical dimension of between about 0.5:1 and about 5:1.
18. The structure as recited in claim 11 , wherein the nanostructures are lamellae.
19. The structure as recited in claim 3 , wherein the second nanostructures are lamellar-shaped, wherein longitudinal axes of the second nanostructures are oriented about perpendicular to longitudinal axes of the first nanostructures.
20. The structure as recited in claim 9 , wherein the second nanostructures are lamellar-shaped, wherein longitudinal axes of the second nanostructures are oriented about perpendicular to longitudinal axes of the first nanostructures.