Liquid crystal display and method of manufacturing the same
View Patent ↗An LCD is manufactured to provide a wide viewing angle device and may reduce manufacturing costs according to an embodiment. The LCD includes a substrate, a gate line disposed on the substrate, a gate insulating layer disposed on the gate line, a semiconductor layer disposed on the gate insulating layer, a data line contacting the semiconductor layer, a drain electrode contacting the semiconductor layer and separated from the data line, a pixel electrode contacting the drain electrode, a passivation layer disposed on the pixel electrode, and a common electrode disposed on the passivation layer and including a branch electrode overlapping the pixel electrode. In one embodiment, the pixel electrode contacts an end portion of a thin film transistor. The LCD manufacturing process may be shortened and may save manufacturing costs because the LCD process need not make contact holes to connect the pixel electrode and the TFT.
1. A method of manufacturing a liquid crystal display (LCD), the method comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulating layer on the gate line;
forming a semiconductor pattern including a channel region and located on the gate insulating layer;
forming a data line, a source electrode, and a drain electrode on the gate insulating layer;
forming a first passivation layer on the data line, wherein the forming the first passivation layer includes removing a passivation layer portion that overlaps the channel region;
forming a pixel electrode contacting the drain electrode, and contacting the first passivation layer;
forming a second passivation layer on the pixel electrode; and
forming a common electrode on the second passivation layer.
2. The method claim 1 , wherein the forming the first passivation layer comprises using a slit mask or a halftone mask to pattern the first passivation layer.
3. The method of claim 2 , wherein the forming the first passivation layer on the data line further comprises:
forming a photo resist pattern including a first region having a first thickness on the pixel electrode, a second region having a second thickness on the gate electrode, and an opening region on an end portion of the gate line or an end portion of the data line exposing a passivation material layer, wherein the first thickness is larger than the second thickness; and
etching the passivation material layer using the photo resist pattern as an etching mask.
4. The method of claim 3 , wherein the forming the source electrode and the drain electrode comprises:
etching the second region to expose the passivation layer portion; and
etching the passivation layer portion.
5. The method of claim 1 , wherein the forming the pixel electrode comprises:
depositing a pixel electrode material layer; and
etching a portion of the pixel electrode material layer that overlaps the channel region.
6. The method of claim 5 , wherein the source electrode and the drain electrode are formed after the depositing the pixel electrode material layer, the etching the portion of the pixel electrode material layer, and etching a portion of a data metal layer that overlaps the channel region.
7. The method of claim 6 , wherein the drain electrode is entirely overlapped by the pixel electrode.
8. A method of manufacturing a liquid crystal display, the method comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulating layer on the gate line;
forming a semiconductor pattern including a channel region and located on the gate insulating layer;
forming a data line, a source electrode, and a drain electrode on the gate insulating layer;
forming a first passivation layer that overlaps the data line;
forming a pixel electrode contacting the drain electrode, and contacting the first passivation layer;
forming a second passivation layer on the pixel electrode; and
forming a common electrode on the second passivation layer,
wherein the forming the first passivation layer comprises:
forming a passivation material layer that overlaps the data line;
forming a photo resist pattern that includes a first region having a first thickness and overlapping the pixel electrode, a second region having a second thickness and overlapping the gate electrode, and an opening region located at an end portion of the gate line or an end portion of the data line and exposing a portion of the passivation material layer, wherein the first thickness is larger than the second thickness; and
etching the portion of the passivation material layer.
9. A method of manufacturing a liquid crystal display, the method comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulating layer on the gate line;
forming a semiconductor pattern including a channel region and located on the gate insulating layer;
forming a data line, a source electrode, and a drain electrode on the gate insulating layer;
forming a first passivation layer on the data line;
forming a pixel electrode contacting the drain electrode, and contacting the first passivation layer;
forming a second passivation layer on the pixel electrode; and
forming a common electrode on the second passivation layer,
wherein the forming the pixel electrode includes etching a conductive layer, and
wherein the source electrode and the drain electrode are formed after the etching the conductive layer.