SEMICONDUCTOR DIODE
To provide a semiconductor diode with a part of a semiconductor lamination portion having a mesa structure portion, which is the part where a pn-junction is formed by lamination of an n-type semiconductor layer and a p-type semiconductor layer on a substrate, comprising: a protective insulating film formed by coating a main surface of the mesa structure portion, a side face of the mesa structure portion in which an interface of the pn-junction is exposed, and an etched and exposed surface of the n-type semiconductor layer; and an anode electrode formed in ohmic-contact with the p-type semiconductor layer exposed from an opening formed on a part of the main surface of the mesa structure portion of the protective insulating film, extending from the main surface, through the side face of the mesa structure portion, to the surface of the n-type semiconductor layer.
1 . A semiconductor diode having a mesa structure portion formed by etching and removing a part of a semiconductor lamination portion in which an n-type semiconductor layer and a p-type semiconductor layer are laminated on a substrate to thereby form a pn-junction, so as to extend from a main surface of the p-type semiconductor layer to a part of the n-type semiconductor layer, comprising:
a protective insulating film formed by coating a main surface of the mesa structure portion, a side face of the mesa structure portion in which an interface of the pn-junction is exposed, and an etched and exposed surface of the n-type semiconductor layer; and
an anode electrode formed in ohmic-contact with the p-type semiconductor layer exposed from an opening formed on a part of the main surface of the mesa structure portion of the protective insulating film, extending from the main surface, through the side face of the mesa structure portion, to the surface of the n-type semiconductor layer.
2 . The semiconductor diode according to claim 1 , wherein a semiconductor constituting the semiconductor lamination portion is a nitride semiconductor.
3 . The semiconductor diode according to claim 2 , wherein the nitride semiconductor is gallium nitride.
4 . The semiconductor diode according to claim 2 or 3 , wherein the substrate is an n-type gallium nitride substrate.
5 . The semiconductor diode according to claim 4 , wherein a cathode electrode is provided on the n-type gallium nitride substrate.
7 . The semiconductor diode according to claim 2 , wherein a dopant of the p-type semiconductor layer is magnesium.
8 . The semiconductor diode according to claim 2 , wherein a dopant of the n-type semiconductor layer is silicon.