Ferroelectric memory device and fabrication process thereof, fabrication process of a semiconductor device
View Patent ↗A ferroelectric memory device includes a field effect transistor formed on a semiconductor substrate, an interlayer insulation film formed on the semiconductor substrate so as to cover the field effect transistor, a conductive plug formed in the interlayer insulation film in contact with the first diffusion region, and a ferroelectric capacitor formed over the interlayer insulation in contact with the conductive plug, wherein the ferroelectric capacitor includes a ferroelectric film and upper and lower electrodes sandwiching the ferroelectric film respectively from above and below, the lower electrode being connected electrically to the conductive plug, a layer containing oxygen being interposed between the conductive plug and the lower electrode, a layer containing nitrogen being interposed between the layer containing oxygen and the lower electrode, a self-aligned layer being interposed between the layer containing nitrogen and the lower electrode.
1. A method of fabricating a ferroelectric memory apparatus, comprising:
forming an interlayer insulation film so as to cover a transistor which is formed on a semiconductor substrate;
forming a conductive plug in said interlayer insulation film in contact with a diffusion region of said transistor; and
forming a ferroelectric capacitor over said conductive plug by stacking a lower electrode, a ferroelectric film and an upper electrode,
wherein there is provided, after said process of forming said conductive plug but before said process of forming said lower electrode, the process of: forming a layer containing oxygen on said inter layer insulation film and directly on a surface of said conductive plug; forming a layer containing nitrogen on a surface of said layer containing oxygen including a part of said layer containing oxygen on said conductive plug; and forming a self-alignment film on said layer containing nitrogen,
said process of forming said layer containing oxygen comprises the process of depositing a layer containing Si on said surface of said contact plug; and reacting oxygen radicals to said layer containing Si to convert said layer containing Si into a silicon oxide layer,
wherein said silicon oxide layer has a thickness of 10 nm or less.
2. The method as claimed in claim 1 , wherein said process of forming said layer containing oxygen comprises the process of: supplying a Si compound into said interlayer insulation film and said surface of said contact plug, such that said Si compound is adsorbed to said surface; removing said Si compound remaining in said interlayer insulation film and said surface of said contact plug; supplying an oxidizing agent to said interlayer insulation film and said surface of said contact plug and reacting oxygen atoms with said Si compound absorbed to said surface; and removing said oxidizing agent remaining in said interlayer insulation film and said surface of said contact plug.
3. The method as claimed in claim 1 , wherein said process of forming said layer containing nitrogen comprises the process of reacting NH radicals to a surface of said layer containing oxygen.
4. The method as claimed in claim 1 , wherein said process of forming said layer containing nitrogen comprises the process of reacting nitrogen radicals and hydrogen radicals to a surface of said layer containing oxygen.
5. The method as claimed in claim 1 , wherein said process of forming said self-alignment film is conducted at a temperature of 300° C. or less.
6. The method as claimed in claim 1 , wherein said process of forming said self-alignment film comprises the process of depositing a Ti film by a sputtering process.
7. The method as claimed in claim 1 , wherein said step of reacting oxygen radicals to said layer containing Si comprises the steps of applying an oxygen plasma processing.
8. The method as claimed in claim 7 , wherein said step of reacting oxygen radicals to said layer containing Si comprises the steps of using a plasma CVD processing.
9. The method as claimed in claim 7 , wherein said step of reacting oxygen radicals to said layer containing Si comprises the steps of using an ALD processing apparatus.
10. The method as claimed in claim 3 , wherein said step of reacting NH radicals to said layer containing Si comprises the steps of applying an ammonia plasma processing.
11. The method as claimed in claim 4 , wherein said process of reacting nitrogen radicals and hydrogen radicals to the surface of said layer comprises the steps of using a remote plasma processing apparatus.
12. The method as claimed in claim 1 , the ferroelectric film is formed by an MOCVD process.