Light sensor having reduced dark current
View Patent ↗The light sensor is included on an optical device having a waveguide on a base. The waveguide is configured to guide a light signal through a crystalline light-transmitting medium. The light sensor is also positioned on the base and is configured to receive the light signal from the waveguide. The light sensor includes a planar interface between two different materials. The interface is at a 45° angle relative to a <110> direction of the light-transmitting medium.
1. An optical device, comprising:
a waveguide on a base, the waveguide configured to guide a light signal through a crystalline light-transmitting medium;
a light sensor positioned on the base,
the light sensor including a charge layer between a multiplication layer and an absorption layer,
the absorption layer positioned to receive at least a portion of the light signal from the waveguide,
the absorption layer configured to generate a hole and electron pair in response to receiving a photon of the light signal, and
the multiplication layer positioned to receive the electron generated in the absorption layer and being configured to generate additional electrons in response to receiving the electron; and
the absorption layer including a light-absorbing medium that contacts the light transmitting medium at an interface, the interface being at a 45° angle relative to a <110> direction of the light-transmitting medium.
2. The device of claim 1 , wherein the interface is perpendicular to the base.
3. A method of forming an optical device, comprising:
providing a wafer having a crystalline light-transmitting medium on a base;
forming a waveguide and a sensor on the wafer such that the sensor is positioned to receive a light signal from the waveguide,
the sensor having an interface where two different materials contact one another, the interface being at a 45° angle relative to a <110> direction of the light-transmitting medium.
4. The method of claim 3 , wherein the interface is perpendicular to the base.
5. The method of claim 3 , wherein forming the sensor includes performing a wet etch of the light-transmitting medium.
6. The method of claim 3 , wherein the interface is a location where the light-transmitting medium contacts a light-absorbing medium.
7. The method of claim 6 , wherein the light-transmitting medium is silicon and the light-absorbing medium includes germanium.
8. The method of claim 3 , wherein forming the sensor includes performing a wet etch of the light-transmitting medium while a mask protects a portion of the wafer, the mask having one or more edges that define an unprotected region of the wafer and are each at a 45° angle relative to a <110> direction of the light-transmitting medium.
9. The method of claim 8 , wherein forming the sensor includes wet etching the wafer with the mask in place on the wafer.
10. The method of claim 9 , wherein the wet etch forms a sensor cavity in the light-transmitting medium, a side of the sensor cavity including a surface of the light-transmitting medium that is perpendicular to the base and is at a 45° angle relative to a <110> direction of the light-transmitting medium.
11. The method of claim 10 , wherein the side of the sensor cavity is formed by the wet etch.
12. The method of claim 11 , wherein forming the sensor includes performing an epitaxial growth of a light-absorbing medium in a least a portion of the sensor cavity.
13. The method of claim 12 , where forming the sensor includes forming a doped region in a portion of the light-transmitting medium that includes the side, the doped region being formed before performing the epitaxial growth.
14. The method of claim 13 , wherein sensor includes a charge region between a multiplication layer and an absorption layer, the doped region being included in the charge layer.
15. The device of claim 1 , wherein the light-transmitting medium is silicon and the light-absorbing medium includes germanium.
16. The device of claim 1 , wherein the light sensor includes a ridge extending from slab regions positioned on opposing sides of the ridge, the ridge includes the charge layer, the multiplication layer and the absorption layer.
17. The device of claim 16 , wherein the multiplication layer contacts the base.
18. The device of claim 16 , wherein none of the absorption layer is between the base and the multiplication layer.
19. The device of claim 16 , wherein a region of the light-transmitting medium that is included in both the ridge and one of the slab region is doped so as to be electrically conducting.
20. The device of claim 16 , wherein a region of the light-absorbing medium that is included in both the ridge and one of the slab region is doped so as to be electrically conducting.