Enhancing uniformity of slab region thickness in optical components
View Patent ↗A method of forming an optical device includes generating a device precursor having a layer of a light-transmitting medium on a base. The method also includes forming an etch stop on the layer of light-transmitting medium. An active medium is grown on the etch stop and on the light-transmitting medium such that the light-transmitting medium is between the base and the grown active medium. The grown active medium is etched down to the etch stop so as to define a ridge in the active medium. The ridge of active medium defines a portion of a component waveguide that will guide a light signal through an active component on the device.
1. A method of forming an optical device, comprising:
generating a device precursor having a layer of a light-transmitting medium on a base;
forming an etch stop on the layer of light-transmitting medium;
growing an active medium on the etch stop and on the light-transmitting medium such that the light-transmitting medium is between the base and the grown active medium; and
etching the grown active medium down to the etch stop so as to define a ridge in the active medium, the ridge of active medium defining a portion of a component waveguide configured to guide a light signal through an active component on the device.
2. The method of claim 1 , wherein the etch stop is formed such that the etch stop protects a portion of the light-transmitting medium while leaving exposed another portion of the light-transmitting medium.
3. The method of claim 1 , wherein the active medium is grown on the exposed portion of the light-transmitting medium.
4. The method of claim 3 , wherein the ridge of the active medium directly contacts the light-transmitting medium.
5. The method of claim 1 , wherein a portion of the layer of light-transmitting medium extends outwards from under the ridge of active medium.
6. The method of claim 1 , further comprising:
growing a second layer of the light-transmitting medium on the layer of the light-transmitting medium, the second layer being grown before the active medium is grown.
7. The method of claim 6 , wherein growing the second layer of the light-transmitting medium includes growing the second layer of the light-transmitting medium on the etch stop.
8. The method of claim 7 , further comprising:
etching the portion of the second layer of the light-transmitting medium down to the etch stop so as to expose at least a portion of the etch stop.
9. The method of claim 8 , wherein the active medium is grown on the exposed portion of the etch stop.
10. The method of claim 9 , wherein the light-transmitting medium is silicon and the active medium includes germanium.
11. The method of claim 6 , further comprising:
etching the light-transmitting medium after growing the second layer of the light-transmitting medium, the etch of the light-transmitting medium defining a ridge a ridge in the light-transmitting medium, the ridge of light-transmitting medium defining a portion of a device waveguide that is aligned with the component waveguide such that the component waveguide and the device waveguide exchange light signals.
12. The method of claim 11 , wherein the device waveguide and the component waveguide are butt-coupled.
13. The method of claim 1 , wherein the active component is selected from a group consisting of a light sensor and an optical modulator.