Liquid immersion sensor
View Patent ↗Disclosed is a liquid immersion sensor comprising a substrate ( 10 ) carrying a conductive sensing element ( 20 ) and a corrosive agent ( 30 ) for corroding the conductive sensing element, said corrosive agent being immobilized in the vicinity of the conductive sensing element and being soluble in said liquid.
1. A liquid immersion sensor for immersion in a liquid comprising:
a substrate carrying a conductive sensing element and a corrosive agent for corroding the conductive sensing element, said corrosive agent being immobilized and disposed apart from the conductive sensing element and being soluble in said liquid; and
a wall structure that at least partially surrounds the corrosive agent, wherein the wall structure is disposed between the corrosive agent and the conductive sensing element.
2. The liquid immersion sensor of claim 1 , wherein the substrate is a semiconductor substrate.
3. The liquid immersion sensor of claim 1 , wherein the conductive sensing element comprises a conductive portion extending between opposite contact terminals.
4. The liquid immersion sensor of claim 1 , wherein the conductive sensing element comprises a plurality of bond pads, each said bond pad being connected to a conductive wire.
5. The liquid immersion sensor of claim 4 , wherein at least some of said conductive wires connect respective bond pads.
6. The liquid immersion sensor of claim 1 wherein the substrate lies in a plane and wherein the wall structure has a height that extends above the plane of the substrate.
7. The liquid immersion sensor of claim 1 wherein the height of the wall structure and the height of the conductive sensing element are substantially equal.
8. A liquid immersion sensor for immersion in a liquid comprising:
a substrate carrying a conductive sensing element and a corrosive agent for corroding the conductive sensing element, said corrosive agent being immobilized and disposed apart from the conductive sensing element and being soluble in said liquid, wherein the substrate comprises a trench extending from the corrosive agent to the conductive sensing element.
9. The liquid immersion sensor of claim 8 , wherein the corrosive agent is a chloride salt.
10. An integrated circuit comprising the liquid immersion sensor of claim 8 .
11. The liquid immersion sensor of claim 8 , wherein a liquid-soluble adhesive couples the corrosive agent to the substrate.
12. The liquid immersion sensor of claim 8 , wherein the corrosive agent is a bromide salt.
13. The liquid immersion sensor of claim 8 , wherein the corrosive agent is an iodide salt.
14. The liquid immersion sensor of claim 8 , wherein the corrosive agent is a cyanide salt.
15. The liquid immersion sensor of claim 8 , wherein the corrosive agent is an oxygen-generating compound.
16. The liquid immersion sensor of claim 8 , wherein the corrosive agent is a noble metal that supports galvanic corrosion.