Method for producing silicon layers
View Patent ↗The invention relates to a liquid-phase method for the thermal production of silicon layers on a substrate, wherein at least one higher silicon that can be produced from at least one hydridosilane of the generic formula Si a H 2a+2 (with a=3-10) being applied to a substrate and then being thermally converted to a layer that substantially consists of silicon, the thermal conversion of the higher silane proceeding at a temperature of 500-900° C. and a conversion time of ≦5 minutes. The invention also relates to silicon layers producible according to said method and to their use.
1. A process for producing a silicon layer on a substrate, the process comprising:
(a) applying at least one higher silane obtained from neopentasilane Si(SiH 3 ) 3 to a substrate to form an applied layer; and then
(b) thermally converting the applied layer to a product layer comprising silicon,
wherein the thermally converting (b) occurs at a temperature of from 500 to 900° C.; and in a conversion time of ≦5 minutes.
2. The process of claim 1 , wherein the at least one higher silane has a weight-average molecular weight of from 330 to 10,000 g/mol.
3. The process of claim 1 , wherein the at least one higher silane is dissolved in a solvent.
4. The process of claim 1 , wherein a proportion of from 5 to 100% by weight of the at least one higher silane is applied to the substrate, based on a total mass of a composition comprising the at least one higher silane.
5. The process of claim 1 , wherein the at least one higher silane is applied to the substrate together with at least one dopant selected from the group consisting of a compound comprising a group III element and a compound comprising a group V element.
6. The process of claim 1 , wherein the substrate comprises glass, quartz glass, graphite, metal, plastic, silicon, or a silicon, indium tin oxide, ZnO:F or SnO 2 :F layer on a heat-compatible carrier.
7. The process of claim 1 , wherein the applying (a) occurs by a process selected from the group consisting of a printing process, a spraying process, a rotary coating process, a dipping process, meniscus coating, slit coating, slot-die coating and curtain coating.
8. The process of claim 1 , wherein the thermally converting (b) occurs at a temperature of from 500 to 650° C.
9. The process of claim 1 , wherein the conversion time is from 0.1 ms to 120 s.
10. The process of claim 1 , wherein the thermally converting (b) is a single thermal process step.
11. The process of claim 1 , further comprising applying UV radiation to the substrate before, during or after the thermally converting (b).
12. The process of claim 1 , further comprising reducing the pressure after the applying (a) and before the thermally converting (b).
13. A silicon layer obtained by the process of claim 1 .
14. An electronic or optoelectronic component layer comprising the silicon layer of claim 13 .
15. The process of claim 1 , wherein the conversion time is from 0.1 to 60 s.
16. The process of claim 1 , comprising first polymerizing the neopentasilane Si(SiH 3 ) 3 to obtain at least one higher silane having a molecular weight of 330-10,000 g/mol and then applying the at least one higher silane to a substrate.
17. The process of claim 1 , the thermal conversion time is from 0.1 msec to 120 sec.
18. The process of claim 1 , the thermal conversion time is from 0.1 sec to 120 sec.
19. The process of claim 1 , the thermal conversion time is from 0.1 sec to 60 sec.
20. The process of claim 1 , the thermal conversion time is from 20 sec to 120 sec.