Coil section assembly for simulating circular coils for vacuum devices
View Patent ↗The invention relates to a vacuum treatment chamber, comprising a coil arrangement for generating a magnetic field in the chamber, wherein the coil arrangement comprises at least one first coil section and a second coil section, wherein the first coil section and the second coil section are arranged adjacent to each other in cross-section and preferably in one plane, such that at least a partial section of the first coil substantially follows the course of a partial section of the second coil, wherein the spacing of the first partial section from the second partial section is at least one order of magnitude smaller than the cross-section of the optionally smaller coil section.
1. A vacuum treatment chamber, comprising:
a coil arrangement for generating a magnetic field within the chamber, the coil arrangement comprising at least one lower coil configured as a multi-section coil, the multi-section coil comprising at least one first coil section and a second coil section, the first coil section and the second coil section being arranged adjacent to each other in cross-section and in one plane, at least one segment of the first coil section essentially following a contour of one segment of the second coil section,
a distance between the segment of the first coil section and the segment of the second coil section being smaller than a cross-section of a smaller one of the first coil section and the second coil section; and
a front door, the first coil section being mounted on the bottom of the front door and configured to tilt together with the front door away from the chamber.
2. The vacuum treatment chamber according to claim 1 , wherein the coil arrangement further comprises another coil, and
wherein the coil arrangement constitutes a Helmholtz coil arrangement corresponding essentially to a diameter of the chamber.
3. The vacuum treatment chamber according to claim 1 , wherein the first coil section does not constitute a common electric circuit with the second coil section and is electrically decoupled.
4. The vacuum treatment chamber according to claim 1 , wherein the first coil section is mounted such that the first coil section is mechanically decoupled from the second coil section.
5. A vacuum treatment facility, comprising:
a coating facility comprising the vacuum treatment chamber according to claim 1 .
6. A coating facility, comprising:
the vacuum treatment chamber according to claim 1 .