Acceleration sensor
View Patent ↗An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
1. An acceleration sensor, comprising:
a sensor unit including a first weight portion and a second weight portion, wherein the first weight portion and the second weight portion are each rotatably supported by a respective pair of beam portions aligned in a straight line and configured to rotatably support the first weight portion and the second weight portion,
electrode portions disposed between the first weight portion and the second weight portion, and
a frame portion surrounding the first weight portion and the second weight portion,
wherein each of the first weight portion and the second weight portion has hollow sections in a plan view and a pair of recesses formed in respective side surfaces,
wherein each of the beam portions is in contact with a respective one of the recesses, and
wherein the frame portion comprises a first section and a second section, each of the first section and the second section having a first region of substantially uniform width and a second region having a width that is larger than a width of the first region in the plan view.
2. The acceleration sensor of claim 1 , wherein the acceleration sensor comprises two or more sensor units formed in a single chip.
3. The acceleration sensor of claim 1 , wherein the sensor unit comprises
a movable electrode provided on a surface of the weight portion, and
a fixed electrode facing the movable electrode,
wherein the acceleration sensor is configured to detect acceleration based on a change in capacitance between the movable electrode and the fixed electrode caused by rotation of the weight portion about a rotation axis defined by the straight line in which the beam portions are aligned.
4. The acceleration sensor of claim 1 , wherein each of the second regions of the frame portion extends from a respective corner of the frame section.
5. The acceleration sensor of claim 1 , wherein each of the beam portions extend from the frame portion.
6. The acceleration sensor of claim 1 , wherein the electrode portions are surrounded by the frame portion.
7. The acceleration sensor of claim 1 , wherein the weight portions are arranged in point symmetry with respect to an earth electrode provided on an upper surface of a central one of the electrode portions.