Electrodynamic speaker structure having MEMS technology
View Patent ↗The present invention relates to the field of electrodynamic speakers. Particularly, the present invention relates to an electrodynamic speaker structure having MEMS technology. More particularly, the invention relates to such a structure comprising stator-forming means, diaphragm-forming means, and resiliently shape-changing means for connecting such means.
1. An electrodynamic speaker structure having MEMS technology, comprising a stator-forming means, diaphragm-forming means, and resiliently shape-changing means for connecting all of said means, wherein the stator-forming means, diaphragm-forming means, and connecting means are made of a single part by machining a silicon chip; and wherein at least one of the surfaces of the diaphragm-forming means includes a coil-forming means, the mass of the coil-forming means being approximately equal to the mass of the diaphragm-forming means.
2. The electrodynamic speaker structure according to claim 1 , wherein the connecting means include connecting arms regularly distributed between the stator-forming means and the diaphragm-forming means.
3. The electrodynamic speaker structure according to claim 1 , wherein at least one of the surfaces of the diaphragm-forming means comprises stiffening means thereof.
4. The electrodynamic speaker structure according to claim 3 , wherein the stiffening means includes ribs.
5. The electrodynamic speaker structure according to claim 4 , wherein the stiffening means includes radial ribs.
6. The electrodynamic speaker structure according to claim 1 , wherein the diaphragm-forming means has a thickness increasing toward the periphery thereof.
7. The electrodynamic speaker structure according to claim 1 , wherein the coil-forming means comprises electrical connecting portions supported by the connecting means.
8. The electrodynamic speaker structure according to claim 1 , wherein the coil-forming means is made from copper.
9. The electrodynamic speaker structure according to claim 1 , wherein at least one of the surfaces of the stator-forming means includes a means made from a hard magnetic material.
10. The electrodynamic speaker structure according to claim 9 , wherein the means made from the hard magnetic material assumes the form of a ring arranged around the diaphragm-forming means.
11. The electrodynamic speaker structure according to claim 9 , wherein the means made from a hard magnetic material is made from a Samarium-Cobalt or Iron-Neodyme-Boron alloy.
12. The electrodynamic speaker structure according to claim 1 , wherein at least one of the surfaces of the diaphragm-forming means includes blind piercings.
13. The electrodynamic speaker structure according to claim 1 , wherein the silicon chip in which the different means of the structure are machined is based on SOI technology.
14. The electrodynamic speaker structure according to claim 1 , wherein the chip is made from monocrystalline silicon.
15. The electrodynamic speaker structure according to claim 2 , wherein the connecting arms have a smaller thickness than that of the diaphragm-forming means.
16. An electrodynamic speaker structure having MEMS technology, comprising elements including a stator, a diaphragm, and resiliently shape-changing connecting arms for connecting all of said elements, wherein the stator, the diaphragm and the connecting arms are made of a single part by machining a silicon chip, and wherein at least one of the surfaces of the diaphragm includes a coil, the mass of the coil being approximately equal to the mass of the diaphragm.