Integrated capacitive device and integrated analog digital converter comprising such a device
View Patent ↗An integrated capacitive device includes an electrically conducting comb, at least some of whose teeth form first electrodes of capacitors, and electrically conducting fingers extending between the teeth of the comb so as to form second electrodes of the capacitors. The device includes a first finger-teeth set having a single reference finger forming a reference capacitor having a reference capacitive value, at least one second finger-teeth set including several fingers, the reference finger and the number of fingers of the second finger-teeth set or sets forming a geometric series with ratio two. At least one additional set includes a single additional finger forming, with at least one tooth of the comb, an additional capacitor having an additional capacitive value substantially equal to half the reference capacitive value.
1. An integrated capacitive device comprising:
an electrically conducting comb including a plurality of teeth, at least some of which define first electrodes of capacitors;
electrically conducting fingers extending between the teeth of the comb to define second electrodes of the capacitors;
the capacitors being defined by the plurality of teeth and corresponding fingers including
a first finger-teeth set including a reference finger forming a reference capacitor having a reference capacitive value,
at least one second finger-teeth set including several fingers distributed on at least one side of the reference finger,
the reference finger and the several fingers of the at least one second finger-teeth set forming a geometric series with ratio two,
at least one additional finger-teeth set including an additional finger defining, with at least one tooth of the comb, an additional capacitor having an additional capacitive value equal to a fraction of the reference capacitive value.
2. The integrated device according to claim 1 , wherein the additional capacitive value of the additional capacitor is substantially equal to half the reference capacitive value.
3. The integrated device according to claim 1 , wherein the additional set comprises an additional tooth, and the additional finger extends between the additional tooth and a tooth of the second finger-teeth set.
4. The integrated device according to claim 1 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length substantially equal to half the first length.
5. The integrated device according to claim 1 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length less than half the first length.
6. The integrated device according to claim 5 , wherein the additional finger has a length between a quarter and a half of the first length.
7. The integrated device according to claim 1 , wherein the reference finger and the fingers of the second finger-teeth set are embodied on a first even number of metallization levels, and the additional finger is embodied on a number of metallization levels equal to half the first even number.
8. The integrated device according to claim 1 , wherein the reference finger and the fingers of the second set have first ends situated respectively at a same first distance a back of the comb; and wherein the back of the comb comprises at least one appendage extending opposite the additional finger, and the additional finger has an end situated at a distance greater than or equal to the first distance from the at least one appendage.
9. The integrated device according to claim 1 , comprising several additional finger-teeth sets, each comprising an additional finger, and defining additional capacitors with capacitive values forming, substantially with the reference capacitive value, a geometric series with ratio one half.
10. The integrated device according to claim 9 , wherein the reference finger has a first length, and the lengths of the additional fingers form substantially with the first length a geometric series with ratio one half.
11. The integrated device according to claim 9 , wherein the reference finger and the fingers of the second finger-teeth set are embodied on a first even number of metallization levels, and the numbers of metallization levels of the additional fingers form, with the first even number, a geometric series with ratio one half.
12. The integrated device according to claim 9 , wherein the reference finger and the fingers of the second set have first ends situated respectively at a same first distance from the back of the comb; and wherein the back of the comb comprises several appendages extending respectively opposite the additional fingers, and each additional finger has an end situated at a distance greater than or equal to the first distance from the corresponding appendage.
13. An integrated analog/digital converter comprising:
an integrated capacitive device including
an electrically conducting comb having a plurality of teeth, at least some of which define first electrodes of capacitors;
electrically conducting fingers extending between the teeth of the comb to define second electrodes of the capacitors;
the capacitors being defined by the plurality of teeth and corresponding fingers including
a first finger-teeth set including a reference finger forming a reference capacitor having a reference capacitive value,
at least one second finger-teeth set including several fingers distributed on at least one side of the reference finger,
the reference finger and the several fingers of the at least one second finger-teeth set forming a geometric series with ratio two,
at least one additional finger-teeth set including an additional finger defining, with at least one tooth of the comb, an additional capacitor having an additional capacitive value equal to a fraction of the reference capacitive value.
14. The integrated analog/digital converter according to claim 13 , wherein the additional capacitive value of the additional capacitor is substantially equal to half the reference capacitive value.
15. The integrated analog/digital converter according to claim 13 , wherein the additional set comprises an additional tooth, and the additional finger extends between the additional tooth and a tooth of the second finger-teeth set.
16. The integrated analog/digital converter according to claim 13 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length substantially equal to half the first length.
17. The integrated analog/digital converter according to claim 13 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length less than half the first length.
18. A method of making an integrated capacitive device, the method comprising:
forming an electrically conducting comb including a plurality of teeth, at least some of which define first electrodes of capacitors;
forming electrically conducting fingers extending between the teeth of the comb to define second electrodes of the capacitors;
the capacitors being defined by the plurality of teeth and corresponding fingers including
a first finger-teeth set including a reference finger forming a reference capacitor having a reference capacitive value,
at least one second finger-teeth set including several fingers distributed on at least one side of the reference finger,
the reference finger and the several fingers of the at least one second finger-teeth set forming a geometric series with ratio two,
at least one additional finger-teeth set including an additional finger defining, with at least one tooth of the comb, an additional capacitor having an additional capacitive value equal to a fraction of the reference capacitive value.
19. The method according to claim 18 , wherein the additional capacitive value of the additional capacitor is substantially equal to half the reference capacitive value.
20. The method according to claim 18 , wherein the additional set comprises an additional tooth, and the additional finger extends between the additional tooth and a tooth of the second finger-teeth set.
21. The method according to claim 20 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length substantially equal to half the first length.
22. The method according to claim 18 , wherein the reference finger and the fingers of the second finger-teeth set have matching first lengths, and the additional finger has a length less than half the first length.
23. The method according to claim 18 , wherein the reference finger and the fingers of the second finger-teeth set are embodied on a first even number of metallization levels, and the additional finger is embodied on a number of metallization levels equal to half the first even number.
24. The method according to claim 18 , wherein the reference finger and the fingers of the second set have first ends situated respectively at a same first distance from a back of the comb; and wherein the back of the comb comprises at least one appendage extending opposite the additional finger, and the additional finger has an end situated at a distance greater than or equal to the first distance from the at least one appendage.