Stress buffer for near-field transducer in energy assisted magnetic recording and methods for fabricating the same
View Patent ↗An energy assisted magnetic recording (EAMR) head having a stress buffer for reducing the stress on a near-field transducer during thermal expansion and methods for fabricating the EAMR head are provided. The EAMR head includes a waveguide, a near-field transducer (NFT) configured to receive optical energy from the waveguide, and a cladding of the waveguide has an opening. The NFT is positioned within the opening, and an air gap is formed between the NFT and a side wall of the opening.
1. An energy assisted magnetic recording (EAMR) head comprising:
a waveguide;
a near-field transducer (NFT) configured to receive optical energy from the waveguide;
a cladding of the waveguide having an opening, wherein the NFT is positioned within the opening; and
an air gap positioned between the NFT and a side wall of the opening.
2. The EAMR head of claim 1 , wherein the cladding comprises a dielectric layer.
3. The EAMR head of claim 1 , wherein the NFT comprises a body and a pin extending from a first portion of the body, and the air gap is located at a second portion, opposite the first portion, of the body.
4. The EAMR head of claim 1 , wherein the air gap extends around a portion of a periphery of the NFT.
5. The EAMR head of claim 1 , wherein the air gap has a shape conforming to a portion of a periphery of the NFT.
6. The EAMR head of claim 1 , wherein the air gap has a width corresponding to a dimension of the NFT.
7. The EAMR head of claim 6 , wherein a ratio of the width of the air gap to a thickness of the NFT is about one-fifth.
8. The EAMR head of claim 6 , wherein the width of the air gap is about 10 nm.
9. The EAMR head of claim 1 , wherein the air gap has a preselected width sufficient to reduce a stress on the NFT during a thermal expansion thereof by a preselected amount.
10. The EAMR head of claim 1 , wherein the air gap is located at a portion of the NFT facing away from an air bearing surface.
11. The EAMR head of claim 1 , wherein the air gap comprises a plurality of air gaps respectively bordering different portions of a periphery of the NFT.
12. The EAMR head of claim 11 , wherein the plurality of air gaps respectively correspond in position to preselected thermal expansion portions of the NFT.
13. The EAMR head of claim 11 , wherein the plurality of air gaps comprise:
a first air gap located at a first portion of the NFT facing away from an air bearing surface (ABS); and
a second air gap and a third air gap respectively located at opposite portions of the NFT along a line that is substantially parallel to the ABS and substantially bisects a portion of the NFT.
14. The EAMR head of claim 1 , wherein the waveguide comprises a waveguide core and the cladding comprising a first cladding and a second cladding, the waveguide core being positioned between the first cladding and the second cladding.
15. A method of fabricating an energy assisted magnetic recording (EAMR) head, the method comprising:
forming a first cladding;
forming a waveguide core on the first cladding;
forming a spacer on the waveguide core;
forming a near field transducer (NFT) on the spacer;
forming a second cladding on the waveguide core, the second cladding having an opening, wherein the NFT is positioned within the opening; and
forming an air gap positioned between the NFT and a side wall of the opening.
16. The method of claim 15 , wherein the air gap extends around a portion of a periphery of the NFT.
17. The method of claim 15 , wherein the air gap has a shape conforming to a portion of a periphery of the NFT.
18. The method of claim 15 , wherein the air gap has a width corresponding to a dimension of the NFT.
19. The method of claim 18 , wherein a ratio of the width of the air gap to a thickness of the NFT is about one-fifth.
20. The method of claim 18 , wherein the width of the air gap is about 10 nm.
21. The method of claim 15 , wherein the air gap has a preselected width to reduce a stress on the NFT during a thermal expansion thereof by a preselected amount.
22. The method of claim 15 , wherein the air gap is located at a portion of the NFT facing away from an air bearing surface.
23. The method of claim 15 , wherein the forming the air gap comprises forming a plurality of air gaps respectively bordering different portions of a periphery of the NFT.
24. The method of claim 23 , wherein the NFT has multiple poles, and the plurality of air gaps correspond in position to the multiple poles, respectively.
25. The method of claim 23 , wherein the plurality of air gaps comprise:
a first air gap located at a first portion of the NFT facing away from an air bearing surface (ABS); and
a second air gap and a third air gap respectively located at opposite portions of the NFT along a line that is substantially parallel to the ABS and substantially bisects a portion of the NFT.
26. The method of claim 15 , wherein the forming the air gap comprises:
forming a spacer layer on the NFT, the spacer layer having a thickness substantially equal to a width of the air gap;
forming a first dielectric layer, the spacer layer positioned between the first dielectric layer and the NFT, and opposite sides of the spacer layer respectively abutting the dielectric layer and the NFT; and
etching away the spacer layer to expose the air gap.
27. The method of claim 26 , wherein the spacer layer comprises Al 2 O 3 .
28. The method of claim 26 , wherein the forming the spacer layer comprises depositing the spacer layer by atomic layer deposition.
29. The method of claim 26 , further comprising forming a photoresist on a portion of the air gap.
30. The method of claim 29 , further comprising:
forming a second dielectric layer on another portion of the air gap not covered by the photoresist; and
removing the photoresist.
31. The method of claim 15 , further comprising adjusting a width of the air gap during a process of fabricating another one of the EAMR head.