Organic light emitting diode display with improved crystallinity of driving semiconductor
An organic light emitting device and a manufacturing method thereof, including a first signal line and a second signal line intersecting each other on an insulating substrate, a switching thin film transistor connected to the first signal line and the second signal line, a driving thin film transistor connected to the switching thin film transistor, and a light emitting diode (“LD”) connected to the driving thin film transistor. The driving thin film transistor includes a driving control electrode and a driving semiconductor overlapping the driving control electrode, crystallized silicon having a doped region and a non-doped region, a driving gate insulating layer disposed between the driving control electrode and the driving semiconductor, and a driving input electrode and a driving output electrode opposite to each other on the driving semiconductor, wherein the interface between the driving gate insulating layer and the driving semiconductor includes nitrogen gas.
1. An organic light emitting device comprising:
a first signal line and a second signal line intersecting the first signal line, the first signal line and the second signal line disposed on an insulating substrate;
a switching thin film transistor electrically connected to the first signal line and the second signal line;
a driving thin film transistor electrically connected to the switching thin film transistor; and
a light emitting diode electrically connected to the driving thin film transistor,
wherein the driving thin film transistor comprises
a driving control electrode,
a driving semiconductor overlapping the driving control electrode,
a driving gate insulating layer disposed between the driving control electrode and the driving semiconductor, wherein the driving gate insulating layer consists of silicon oxide, and
a driving input electrode and a driving output electrode opposed to the driving input electrode, the driving input electrode and the driving output electrode disposed on the driving semiconductor,
wherein an interface between the driving gate insulating layer and the driving semiconductor comprises nitrogen, and wherein a concentration of nitrogen in the interface between the driving gate insulating layer and the driving semiconductor is between about 0.06 atomic percent to about 4.75 atomic percent, based on a total composition of the driving gate insulating layer,
wherein the driving semiconductor comprises crystallized silicon having doped regions and a non-doped region, wherein the doped regions are disposed on both sides of the non-doped region, and
wherein a switching gate insulating layer directly contacts with the non-doped region.
2. The organic light emitting device of claim 1 , wherein the driving input electrode and the driving output electrode overlap the doped region of the driving semiconductor.
3. The organic light emitting device of claim 2 , wherein the driving input electrode and the driving output electrode are disposed between 1 micrometer and 3 micrometers from the non-doped region of the driving semiconductor.
4. The organic light emitting device of claim 1 , wherein the switching thin film transistor comprises:
a switching control electrode;
a switching semiconductor overlapping the switching control electrode, the switching semiconductor comprising amorphous silicon;
the switching gate insulating layer disposed between the switching control electrode and the switching semiconductor, the switching gate insulating layer comprising silicon nitride; and
a switching input electrode and a switching output electrode, the switching input electrode disposed opposite to the switching output electrode, the switching input electrode and the switching output electrode disposed on the switching semiconductor.
5. The organic light emitting device of claim 4 , wherein the driving semiconductor is disposed inside a boundary of the driving control electrode, and the switching semiconductor is disposed inside a boundary of the switching control electrode.
6. The organic light emitting device of claim 4 , wherein the driving control electrode and the switching control electrode are disposed in different layers, and the driving control electrode has a thickness which is less than a thickness of the switching control electrode.
7. The organic light emitting device of claim 6 , wherein the thickness of the driving control electrode is between about 50 nanometers to about 120 nanometers.