Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption
View Patent ↗Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
1. A method of fabricating an optical device comprising:
forming a plurality of mirror periods designed to reflect an optical field at a predetermined wavelength, the optical field having peaks and nulls, wherein forming at least a portion of the plurality of mirror periods further comprises:
forming a first layer having a thickness of less than one-quarter wavelength of the optical field;
forming a first compositional ramp on the first layer; and
forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and further having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
2. The method of claim 1 , further comprising:
forming a first Distributed Bragg Reflector (DBR) containing the plurality of mirror periods;
forming an active region disposed on the first DBR; and
forming a second DBR on the active region, the second DBR containing the plurality of mirror periods.
3. The method of claim 2 , wherein forming the first and second DBRs further comprises forming at least a portion of the mirror periods that are nearest to the active region such that the nulls occur within the second layer, and forming at least a portion of the mirror periods that are further from the active region such that the nulls occur within a compositional ramp.
4. The method of claim 1 , wherein a thickness of each of the plurality of mirror periods is one-half wavelength of the optical field.
5. The method of claim 1 , wherein forming a plurality of mirror periods further comprises forming a second compositional ramp between the second layer of a first mirror period and the first layer of a second mirror period, and wherein the first and second layers and the first and second compositional ramps are formed such that the peaks of the optical field occur within the second compositional ramps and the nulls of the optical field occur at a position slightly offset from the first compositional ramps and within the second layers.
6. The method of claim 1 , wherein forming a plurality of mirror periods further comprises forming a second compositional ramp between the second layer of a first mirror period and the first layer of a second mirror period, and wherein the first and second layers and the first and second compositional ramps are formed such that the peaks of the optical field occur at a position offset from the second compositional ramps and within the first layer and the nulls of the optical field occur at a position offset from the first compositional ramps and within the second layer.
7. The method of claim 1 , wherein the first layer includes a material with relatively low carrier mobility and the second layer includes a material with a higher carrier mobility than the first layer.
8. The method of claim 7 , wherein the optical thickness of the first and second layers is asymmetrical and relative mirror layer thicknesses are chosen such that a null of the optical field occurs within the second layer and not within the first compositional ramp.
9. The method of claim 8 , wherein the elevated doping level near the null is a p-type dopant with a maximum doping concentration in a range from about 7e18/cm 3 to about 5e20/cm 3 .
10. The method of claim 8 , wherein the elevated doping level near the null is a p-type dopant with a maximum doping concentration in a range from about 1e19/cm 3 to about 6e19/cm 3 .
11. The method of claim 8 , wherein the elevated doping level near the null is a p-type dopant with a maximum doping concentration in a range from about 2e19/cm 3 to about 5e19/cm 3 .
12. The method of claim 8 , wherein the elevated doping level near the null is an n-type dopant with a maximum doping concentration in a range from about 3e18/cm 3 to about 9e18/cm 3 .
13. The method of claim 8 , wherein the elevated doping level near the null is an n-type dopant with a maximum doping concentration in a range from about 4e18/cm 3 to about 8e18/cm 3 .
14. The method of claim 8 , wherein the elevated doping level near the null is an n-type dopant with a maximum doping concentration in a range from about 5e18/cm 3 to about 7e18/cm 3 .
15. The method of claim 8 , wherein within the plurality of mirror periods, the doping has a maximum concentration at the null of the optical field.
16. The method of claim 8 , wherein the first and second layers are made from a III-V semiconductor material comprising aluminum and the compositional ramp comprises a decrease or increase in the aluminum fraction of the type III material.
17. The method of claim 8 , wherein the elevated doping level near the null occurs in a III-V material with an aluminum content in a range from about 0% to about 20%.
18. The method of claim 8 , wherein the elevated doping level near the null occurs in a III-V semiconductor material with an aluminum content in a range from about 1.0% to about 20%.
19. The method of claim 8 , further comprising:
forming a first Distributed Bragg Reflector (DBR) containing the plurality of mirror periods;
forming an active region disposed on the first DBR; and
forming a second DBR on the active region, the second DBR containing the plurality of mirror periods.
20. The method of claim 8 , wherein the first layer is thinner than the second layer.
21. The method of claim 8 , wherein the first layer has an optical thickness lower than the second layer.
22. The method of claim 8 , wherein the first layers has a substantially constant Al concentration that is higher than a substantially constant Al concentration of the second layer.
23. The method as recited in claim 8 , wherein the null of the optical field occurs within a segment of the second layer having a maximum elevated doping level and the second layer includes a segment having a lower doping level on each side of the segment with the maximum elevated doping level.