IP Library Granted Patent US 8,993,134
Granted Patent B2
US 8,993,134 · App. 13/537,379 · Granted Mar 31, 2015

Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates

Inventors: Bollapragada Varaprasad (Tsukuba, JP); Yukiko Takahashi (Tsukuba, JP); Kazuhiro Hono (Ibaraki, JP); Antony Ajan (Santa Clara, CA); Hua Yuan (Fremont, CA); Alexander S. Chernyshov (San Jose, CA)
Assignee: Western Digital Technologies, Inc.
G11B5/8404G11B5/7325G11B5/851Y10T428/1121
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Quick Facts
Patent No.
US 8,993,134
App. No.
13/537,379
Granted
Mar 31, 2015
Kind
B2
Abstract

A perpendicular magnetic recording medium, comprising: a substrate; a buffer layer deposited in a first orientation on top of the substrate; an underlayer deposited in a second orientation on top of the buffer layer, the underlayer comprising an electrically conductive oxide; and a magnetic recording layer deposited on top of the underlayer and having an axis of magnetic anisotropy substantially perpendicular to the surface thereof.

Claims (33)

1. A perpendicular magnetic recording medium, comprising:

a substrate;

a buffer layer deposited in a first orientation on top of the substrate;

an underlayer deposited in a second orientation on top of the buffer layer, the underlayer comprising an electrically conductive oxide of Mg with one or more of Ti, Zr and Hf, the oxide comprising between 5 and 35 atomic percent Mg; and

a magnetic recording layer deposited on top of the underlayer and having an axis of magnetic anisotropy substantially perpendicular to the surface thereof.

2. The recording medium of claim 1 , wherein the oxide comprises between 15 and 25 atomic percent Mg.

3. The recording medium of claim 1 , wherein the oxide is MgTiO x .

4. The recording medium of claim 1 , wherein the oxide is MgTiO 2 .

5. The recording medium of in claim 1 , wherein the oxide is MgZrO 3 .

6. The recording medium of in claim 1 , wherein the oxide is MgHfO.

7. The recording medium of claim 1 , further comprising a second buffer layer deposited on top of the substrate, wherein the second buffer layer comprises NiTa.

8. The recording medium of claim 7 , wherein the NiTa is deposited on the substrate by way of DC sputtering.

9. The recording medium of claim 1 , wherein the buffer layer comprises Cr.

10. The recording medium of claim 9 , wherein the Cr is deposited in (200) orientation.

11. The recording medium of claim 9 , wherein the Cr is deposited by way of DC sputtering.

12. The recording medium of claim 1 , wherein the underlayer is deposited on the buffer layer in (001) orientation.

13. The recording medium of claim 12 , wherein the underlayer is deposited on the buffer layer by way of DC sputtering.

14. The recording medium of claim 1 , wherein the magnetic recording layer comprises FePtAgC.

15. The recording medium of claim 14 , wherein the magnetic recording layer is deposited on the underlayer by way of DC co-sputtering.

16. A method for fabricating a perpendicular magnetic recording medium, the method comprising:

depositing a buffer layer on a substrate;

depositing an underlayer over the buffer layer, the underlayer comprising an electrically conductive oxide of Mg with one or more of Ti, Zr and Hf, the oxide comprising between 5 and 35 atomic percent Mg;

heating the substrate and deposited layers; and

depositing a magnetic recording layer over the underlayer.

17. The method of claim 16 , wherein the oxide comprises between 15 and 25 atomic percent Mg.

18. The method of claim 16 , further comprising depositing a second buffer layer on the substrate, and modifying a top surface of the second buffer layer prior to depositing the buffer layer.

19. The method of claim 18 , wherein modifying the top surface comprises introducing oxygen for a predetermined amount of time and allowing the top surface to grow Cr in (200) orientation.

20. The method of claim 16 , wherein the oxide is MgTiO x .

21. The method of claim 16 , wherein the oxide is MgTiO 2 .

22. The method of in claim 16 , wherein the oxide is MgZrO 3 .

23. The method of in claim 16 , wherein the oxide is MgHfO.

24. The method of claim 16 , wherein depositing the buffer layer comprises depositing Cr on a first buffer layer in (200) orientation.

25. The method of claim 16 , wherein depositing the magnetic recording layer comprises depositing FePtAgC on the underlayer by way of DC co-sputtering.

Assignments (6)
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
RELEASE OF SECURITY INTEREST AT REEL 052915 FRAME 0566 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 059127/0001 →
SECURITY INTEREST Recorded Feb 6, 2020
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 052915/0566 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2014
From: VARAPRASAD, BOLLAPRAGADA; TAKAHASHI, YUKIKO; HONO, KAZUHIRO
To: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
Reel/Frame 033782/0213 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2014
From: AJAN, ANTONY; YUAN, HUA; CHERNYSHOV, ALEXANDER S.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 033782/0246 →
Continuity (1)
Related Publication 20140335376A1 · Nov 13, 2014