Methods for reducing surface roughness of magnetic media for storage drives
View Patent ↗Methods for reducing the surface roughness of magnetic media to be used in storage drives are described. One such method includes forming a recording media on a substrate, the recording media including at least one recording layer configured to store information magnetically, depositing a first layer of carbon on the recording media, the first carbon layer having a first average preselected thickness, etching the first carbon layer to have a second average preselected thickness less than the first average preselected thickness, depositing a second layer of carbon on the etched first carbon layer, the second carbon layer having a third average preselected thickness that is less than the first average preselected thickness, and implanting nitrogen in the second carbon layer.
1. A method for reducing surface roughness of magnetic media, the method comprising:
forming a recording media on a substrate, the recording media comprising at least one recording layer configured to store information magnetically, wherein the recording media comprises a plurality of peaks separated by a plurality of valleys and a first surface roughness;
depositing a first carbon layer directly on the recording media in a single deposition, the first carbon layer having a first average preselected thickness, a second surface roughness, wherein the second surface roughness is less than the first surface roughness;
etching the first carbon layer to have a second average preselected thickness less than the first average preselected thickness, wherein the second average preselected thickness is greater than a height of any of the plurality of peaks in the recording media;
depositing a second carbon layer on the etched first carbon layer, the second carbon layer having a third average preselected thickness that is less than the first average preselected thickness; and
implanting nitrogen in the second carbon layer.
2. The method of claim 1 , wherein the etching the first carbon layer to have the second average preselected thickness comprises etching, using an inductively coupled plasma, the first carbon layer to have the second average preselected thickness.
3. The method of claim 2 , wherein the inductively coupled plasma comprises Argon.
4. The method of claim 2 , wherein the implanting the nitrogen in the second carbon layer comprises implanting the nitrogen in the second carbon layer using an inductively coupled plasma comprising the nitrogen.
5. The method of claim 4 , wherein the etching, using the inductively coupled plasma, the first carbon layer to have the second average preselected thickness and the implanting the nitrogen in the second carbon layer using the inductively coupled plasma comprising the nitrogen are performed in the same chamber.
6. The method of claim 1 :
wherein the first average preselected thickness is greater than a depth of any of the plurality of valleys in the recording media.
7. The method of claim 6 , wherein the second average preselected thickness is selected to minimize a surface roughness of the first carbon layer after the etching the first carbon layer.
8. The method of claim 6 , wherein the first average preselected thickness of the first carbon layer is at least twice as much as a depth of any of plurality of valleys in the recording media.
9. The method of claim 1 , wherein the first average preselected thickness of the first carbon layer is at least three times as much as the third average preselected thickness of the second carbon layer.
10. The method of claim 1 :
wherein the recording media comprises a plurality of peaks separated by a plurality of valleys; and
wherein the depositing the first carbon layer on the recording media comprises filling each of the plurality of valleys in the recording media.
11. The method of claim 1 , wherein the depositing the first carbon layer on the recording media comprises substantially reducing a surface roughness of a top surface of the recording media.
12. The method of claim 11 , wherein the depositing the second carbon layer on the etched first carbon layer comprises restoring a top surface of the etched first carbon layer.
13. The method of claim 1 , wherein the first average preselected thickness is selected to substantially reduce a surface roughness of a top surface of the recording media.
14. The method of claim 1 , wherein the first average preselected thickness is between about 35 angstroms and about 40 angstroms.
15. The method of claim 1 , wherein the second average preselected thickness is about 15 angstroms.
16. The method of claim 1 , wherein the third average preselected thickness is about 5 angstroms and about 10 angstroms.
17. The method of claim 1 , wherein the etching the first carbon layer comprises etching about 20 percent of the first carbon layer.
18. The method of claim 1 , wherein the etching the first carbon layer comprises etching about 80 percent to about 90 percent of the first carbon layer.