System and method to manufacture an implantable electrode
View Patent ↗The method of the preferred embodiments includes the steps of providing a base having a frame portion and a center portion; building a preliminary structure coupled to the base; removing a portion of the preliminary structure to define a series of devices and a plurality of bridges; removing the center portion of the base such that the frame portion defines an open region, wherein the plurality of bridges suspend the series of devices in the open region defined by the frame; and encapsulating the series of devices. The method is preferably designed for the manufacture of semiconductor devices, and more specifically for the manufacture of encapsulated implantable electrodes. The method, however, may be alternatively used in any suitable environment and for any suitable reason.
1. An implantable electrode system, comprising:
a) a base comprising a frame portion defining an open region;
b) at least one bridge extending from the frame portion into the open region;
c) an electrode structure comprising a conductive lead and at least one of a stimulation electrode site and a recording electrode site; and
d) a coating that encapsulates the electrode structure,
e) wherein the electrode structure is coupled to the at least one bridge, spaced from the frame portion, to thereby be suspended in the open region defined by the frame portion of the base by the bridge, and
f) wherein the electrode structure is removable from the at least one bridge such that upon removal, the electrode structure is encapsulated in a conformal coat of the coating.
2. The implantable electrode system of claim 1 wherein the coating further encapsulates the base and the bridge.
3. The implantable electrode system of claim 2 wherein the coating is a conformal coat of a polymer material.
4. The implantable electrode system of claim 3 wherein the coating includes parylene.
5. The implantable electrode system of claim 1 wherein the base is a wafer.
6. The implantable electrode system of claim 5 wherein the wafer is made of silicon.
7. The implantable electrode system of claim 1 wherein the electrode structure comprises a plurality of layers and the at least one bridge comprise the same plurality of layers as the electrode structure.
8. The implantable electrode system of claim 7 wherein each layer of the plurality of layers of the electrode structure and of the at least one bridge is selected from the group consisting of silicon, metal, and polymer.
9. The implantable electrode system of claim 1 wherein the electrode structure comprises a plurality of layers comprising a plurality of conductive leads and a plurality of electrode sites, wherein each electrode site is coupled to a respective conductive lead.
10. The implantable electrode system of claim 1 comprising a plurality of electrode structures, wherein each electrode structure is coupled to at least one bridge and is thereby suspended in the open region defined by the frame portion of the base by the bridge.
11. The implantable electrode system of claim 1 wherein the conductive lead is disposed adjacent to a dielectric stack that provides electrical insulation to the conductive lead.
12. The implantable electrode system of claim 11 wherein the dielectric stack comprises one or more layers of dielectric material selected from the group consisting of silicon, silicon dioxide, silicon nitride, silicon dioxide, silicon carbide, polyimide, parylene, PTFE, silicone.
13. A semiconductor device system, comprising:
a) a wafer comprising a frame portion defining an open region;
b) at least one bridge extending from the frame portion into the open region;
c) a semiconductor device comprising a plurality of lavers comprising a conductive lead and a plurality of electrode sites, the plurality of electrode sites comprising at least one of a stimulation electrode site and a recording electrode site coupled to the conductive lead; and
d) a coating that encapsulates the semiconductor device,
e) wherein the semiconductor device is coupled to the at least one bridge, spaced from the frame portion, to thereby be suspended in the open region defined by the frame portion of the wafer by the bridge, and
f) wherein the electrode structure is removable from the at least one bridge such that upon removal, the electrode structure is encapsulated in a conformal coat of the coating.
14. The semiconductor device system of claim 13 wherein the at least one bridge coupled to the semiconductor device comprises the same plurality of layers as the semiconductor device.
15. The semiconductor device system of claim 14 wherein each layer of the plurality of layers of the semiconductor device and of the at least one bridge is selected from the group consisting of silicon, metal, and polymer.
16. The semiconductor device system of claim 13 wherein the conductive lead is disposed adjacent to a dielectric stack that provides electrical insulation to the conductive lead.
17. The semiconductor device system of claim 16 wherein the dielectric stack comprises one or more layers of dielectric material selected from the group consisting of silicon, silicon dioxide, silicon nitride, silicon dioxide, silicon carbide, polyimide, parylene, PTFE, silicone.
18. The semiconductor device system of claim 13 comprising a plurality of semiconductor devices, wherein each semiconductor device is coupled to at least one bridge to be thereby suspended in the open region of the wafer by the bridge.
19. A semiconductor device system, comprising:
a) a base comprising a frame portion defining an open region;
b) a plurality of bridges extending from the frame portion into the open region;
c) a semiconductor device formed from a preliminary electrode structure coupled to the base, the preliminary electrode structure comprising a plurality of layers comprising a conductive lead and at least one of a stimulation electrode site and a recording electrode site; and
d) a coating that encapsulates the electrode structure,
e) wherein the semiconductor device is coupled to at least one bridge, spaced from the frame portion of the base, to be thereby suspended in the open region of the frame portion of the base by the bridge, and
f) wherein the electrode structure is removable from the at least one bridge such that upon removal, the electrode structure is encapsulated in a conformal coat of the coating.