Array substrate and manufacturing method
View Patent ↗Manufacturing an array substrate includes forming data and gate lines which cross and a gate electrode on a substrate. The data line is discontinuously disposed to be separated from the gate line, or the gate line is discontinuously disposed to be separated from the data line. Active and gate insulating layers including bridge and source electrode vias are formed on the substrate. The bridge vias correspond to adjacent discontinuous sections of the data line or the gate line. The source electrode via corresponds to the data line. Pixel, source, and drain electrodes and a bridge line are formed on the substrate. The pixel electrode and the drain electrode are integral. The source electrode is connected to the data line through the source electrode via. The bridge line connects adjacent discontinuous sections of the data line or adjacent discontinuous sections of the gate line through bridge vias.
1. An array substrate, comprising:
a base substrate,
a data line and a gate line crossed with each other on the base substrate so as to define a pixel unit, and
a pixel electrode and a thin film transistor (TFT) arranged in the pixel unit,
wherein the TFT comprises a gate electrode, an active layer, a source electrode and a drain electrode, the data line and the gate line are formed in the same layer, and the data line is discontinuously disposed so as to be separated from the gate line or the gate line is discontinuously disposed so as to be separated from the data line;
bridge via holes and a source electrode via hole are formed in a gate insulating layer covering the data line, the gate line and the gate electrode, and the bridge via holes are located at positions respectively corresponding to adjacent discontinuous sections of the data line or adjacent discontinuous sections of the gate line, and the source electrode via hole corresponds to the data line; and
the source electrode, the drain electrode, the pixel electrode and the bridge line are formed in the same layer, and the drain electrode and the pixel electrode are formed integrally, and the source electrode is connected with the data line through the source electrode via hole and the bridge line connects the adjacent discontinuous sections of the data line or the adjacent discontinuous sections of the gate line through the bridge via holes.
2. The array substrate as claimed in claim 1 , wherein when the data line is discontinuously disposed, one of the bridge via holes and the source electrode via hole are combined into one via hole.
3. The array substrate as claimed in claim 1 , further comprising:
a protection film layer, covering the source electrode, the drain electrode, the pixel electrode and the bridge line.
4. The array substrate as claimed in claim 1 , wherein the active layer comprises a semiconductor layer and a doped semiconductor layer, and the doped semiconductor layer positioned between the source electrode and the drain electrode is etched away to form a TFT channel.
5. The array substrate as claimed in claim 4 , wherein a thickness of the active layer thin film is 500˜4500 Å.
6. The array substrate as claimed in claim 1 , wherein a material of the active layer is an oxide semiconductor.
7. The array substrate as claimed in claim 1 , wherein the thickness of the data line, the gate electrode and the gate line is 500˜4000 Å, and a material thereof is selected from a group consisting of Cr, W, Ti, Ta, Mo, Al and any combination thereof.
8. The array substrate as claimed in claim 1 , wherein a thickness of the gate insulating layer is 1000˜4000 Å, and a material thereof is selected from a group consisting of oxide, nitride and oxynitride.
9. The array substrate as claimed in claim 1 , wherein a thickness of the pixel electrode is 300˜600 Å and a material thereof is selected from a group consisting of indium tin oxide and indium zinc oxide.
10. The array substrate as claimed in claim 1 , wherein a shape of the cross section of the bridge via hole is a circle, and a shape of the cross section of the source electrode via hole is a rectangle.
11. The array substrate as claimed in claim 1 , wherein a thickness of the protection film layer is 4000˜15000 Å and a material thereof comprises an organic insulating material.
12. The array substrate as claimed in claim 1 , wherein a material of the protection film layer comprises a photosensitive organic insulating material.