Solid-state imaging device, manufacturing method for the same, and imaging apparatus
View Patent ↗A solid-state imaging device includes: a pixel section including, in a semiconductor substrate, plural photoelectric conversion sections that photoelectrically convert incident light to generate signal charges; metal wirings formed, on a first insulating film formed on the semiconductor substrate, above regions among the photoelectric conversion sections and above the periphery of the pixel section; a second insulating film formed on the first insulating film to cover the metal wirings; a first light shielding film formed on the second insulating film and having an opening above the pixel section; and a second light shielding film formed above the metal wirings above the pixel section and having thickness smaller than that of the first light shielding film.
1. A manufacturing method for a solid-state imaging device comprising the steps of:
forming, on a first insulating film that covers a pixel section having plural photoelectric conversion sections that are formed in a semiconductor substrate and photoelectrically convert incident light to generate signal charges, metal wirings above regions among the photoelectric conversion sections and above a periphery of the pixel section;
forming a first light shielding film via a second insulating film that covers the metal wirings;
forming an opening in the first light shielding film above the pixel section;
forming a second light shielding film that has thickness smaller than that of the first light shielding film on the first light shielding film including the opening; and
removing, while leaving the second light shielding film on the second insulating film above the metal wirings above the pixel section, the second light shielding film formed in other regions.
2. A manufacturing method for a solid-state imaging device according to claim 1 , wherein the first light shielding film and the second light shielding film are formed of insulative resin having light shielding properties.
3. A manufacturing method for a solid-state imaging device according to claim 2 , wherein the insulative resin having the light shielding properties is formed of black photosensitive insulative resin.
4. A manufacturing method for a solid-state imaging device comprising the steps of:
forming, on a first insulating film that covers a pixel section having plural photoelectric conversion sections that are formed in a semiconductor substrate and photoelectrically convert incident light to generate signal charges, metal wirings above regions among the photoelectric conversion sections and above a periphery of the pixel section;
forming a second light shielding film via a second insulating film that covers the metal wirings;
removing, while leaving the second light shielding film on the second insulating film above the metal wirings above the pixel section, the second light shielding film formed in other regions;
forming, on the second insulating film, a first light shielding film that covers the second light shielding film and has thickness larger than that of the second light shielding film; and
forming an opening in the first light shielding film above the pixel section.
5. A manufacturing method for a solid-state imaging device according to claim 4 , wherein the first light shielding film and the second light shielding film are formed of insulative resin having light shielding properties.
6. A manufacturing method for a solid-state imaging device according to claim 5 , wherein the insulative resin having the light shielding properties is formed of black photosensitive insulative resin.
7. A manufacturing method for a solid-state imaging device comprising the steps of:
forming, on a first insulating film that covers a pixel section having plural photoelectric conversion sections that are formed in a semiconductor substrate and photoelectrically convert incident light to generate signal charges, metal wirings above regions among the photoelectric conversion sections and above a periphery of the pixel section;
forming a second light shielding film via a second insulating film that covers the metal wirings;
removing, while leaving the second light shielding film above the metal wirings above the pixel section, the remaining second light shielding film above the pixel section to form an opening;
forming, on the second insulating film, a first light shielding film that covers the second light shielding film; and
forming an opening in the first light shielding film above the pixel section.
8. A manufacturing method for a solid-state imaging device according to claim 7 , wherein the first light shielding film and the second light shielding film are formed of insulative resin having light shielding properties.
9. A manufacturing method for a solid-state imaging device according to claim 8 , wherein the insulative resin having the light shielding properties is formed of black photosensitive insulative resin.