Coating composition and uses thereof
A coating composition is provided. The coating composition comprises (a) an aluminum oxide precursor and (b) a solvent, wherein the aluminum oxide precursor (a) comprises aluminum elements and the following groups bound thereon: (a1) a —OR 1 group, wherein R 1 is H or a substituted or unsubstituted C1 to C13 alkyl; (a2) a bidentate chelating group; and (a3) a tetrahedral coordinating group, wherein, the amount of the aluminum oxide precursor (a) is about 1 wt % to about 50 wt %, based on the total weight of the composition, and the total amount of the groups (a1), (a2) and (a3) is no more than 3 moles per 1 mole of the aluminum elements. The coating composition can be used in a semiconductor process for providing a passivation layer.
1. A coating composition comprising:
(a) an aluminum oxide precursor, comprising aluminum elements and following groups bound thereon:
(a1) a —OR 1 group, wherein R 1 is H or a substituted or unsubstituted C1 to C13 alkyl;
(a2) a bidentate chelating group; and
(a3) a tetrahedral coordinating group; and
(b) a solvent,
wherein the amount of the aluminum oxide precursor (a) is about 1 wt % to about 50 wt %, based on the total weight of the composition, and the total amount of the groups (a1), (a2) and (a3) is no more than 3 moles per 1 mole of the aluminum elements, and wherein the moles of the group (a1), M a1 , the moles of the group (a2), M a2 and the moles of the group (a3) M a3 meet the following requirements:
0<M a1 <2.7;
0.3≦M a2 ≦3; and
0<M a3 ≦0.3, per 1 mole of the aluminum elements.
2. The composition of claim 1 , wherein R 1 is H or a substituted or unsubstituted C1 to C4 alkyl.
3. The composition of claim 1 , wherein the group (a2) is
and wherein R 2 and R 3 are identical to or different from each other, R 4 and R 5 are identical to or different from each other, and each of R 2 , R 3 , R 4 and R 5 is independently H or a substituted or unsubstituted C1 to C10 alkyl or alkoxy.
4. The composition of claim 3 , wherein the group (a2) is selected from the group consisting of:
5. The composition of claim 1 , wherein the group (a3) is a non-metallic tetrahedral coordinating group.
6. The composition of claim 1 , wherein the group (a3) is —OYR 7 (OR 6 ) 2 , and wherein Y is P.Si.B or Ti; R 6 is H, a substituted or unsubstituted C1 to C15 alkyl or a substituted or unsubstituted C6 to C15 aryl; and R 7 is —OH or ═O.
7. The composition of claim 6 , wherein the group (a3) is —OPO(OR 6 ) 2 , and R 6 is H or a C1 to C3 alkyl.
8. The composition of claim 1 , wherein the solvent (b) is selected from the group consisting of water, alcohols, ethers, esters, ketones and mixtures thereof.
9. The composition of claim 1 , wherein the amount of the aluminum oxide precursor (a) is about 4 wt % to about 23 wt %, based on the total weight of the composition.
10. A composite material comprising a substrate and a passivation layer, wherein the passivation layer is formed by coating the coating composition of claim 1 on at least one surface of the substrate, and drying and sintering the coated substrate.
11. The composite material of claim 10 , wherein the passivation layer has a thickness of about 10 nm to about 500 nm.
12. The composite material of claim 10 , wherein the passivation layer comprises a plurality of aluminum oxide particles with an average particle size of about 5 nm to about 30 nm.
13. The composite material of claim 12 , wherein the aluminum oxide particles are amorphous aluminum oxide particles.
14. The composite material of claim 10 , wherein the substrate is a ceramic substrate, a silicon substrate or a metallic substrate.