Integrated current sensor
View Patent ↗An integrated current sensor is provided, having a semiconductor body arranged on a metal substrate, having a first surface with a passivation layer embodied on the first surface and a magnetic field concentrator embodied in a flat manner under the semiconductor body, a first Hall-effect sensor embodied under the passivation layer in the semiconductor body, a second Hall-effect sensor embodied under the passivation layer in the semiconductor body, wherein a first conductor is provided embodied on the first surface between the first Hall-effect sensor and the second Hall-effect sensor, and the magnetic field concentrator is embodied under the first Hall-effect sensor and under the second Hall-effect sensor and under the first conductor.
1. An integrated current sensor comprising:
a semiconductor body arranged on a metal substrate, having a first surface with a passivation layer formed on the first surface;
a magnetic field concentrator formed in a flat manner under the semiconductor body;
a first Hall-effect sensor arranged under the passivation layer in the semiconductor body;
a second Hall-effect sensor arranged under the passivation layer in the semiconductor body; and
a first conductor arranged on the first surface separately from and overlapping with, the metal substrate between the first Hall-effect sensor and the second Hall-effect sensor,
wherein the magnetic field concentrator is arranged under the first Hall-effect sensor and under the second Hall-effect sensor and under the first conductor,
wherein the first Hall-effect sensor is arranged at least in part under a first metal surface in an opening of the passivation layer, and wherein the second Hall effect sensor is arranged at least in part under a second metal surface in an opening in the passivation layer,
wherein the first metal surface and the second metal surface are connected to a ferromagnetic first wire formed above the passivation layer, and
wherein the first conductor is guided through under the first wire at a predetermined distance.
2. The integrated current sensor according to claim 1 , wherein the magnetic field concentrator is arranged under the metal substrate in a flat manner.
3. The integrated current sensor according to claim 1 , wherein the first Hall-effect sensor and the second Hall-effect sensor are respectively arranged under an assigned metal surface.
4. The integrated current sensor according to claim 1 , wherein the first conductor has a first connection surface at a first head end and a second connection surface at a second head end.
5. The integrated current sensor according to claim 1 , wherein the first conductor is connected via a bond wire to the metal substrate.
6. The integrated current sensor according to claim 1 , wherein the semiconductor body has an integrated circuit, and the integrated circuit is in an electrical active connection with at least one of the first and second Hall-effect sensors or the first conductor.
7. The integrated current sensor according to claim 1 , wherein the magnetic field concentrator is connected to the metal substrate via an adhesive force.
8. The integrated current sensor according to claim 1 , wherein the magnetic field concentrator is embodied in a one-part manner and covers at least a portion of the Hall-effect sensors.
9. The integrated current sensor according to claim 1 , wherein the semiconductor body and the magnetic field concentrator are arranged in a single common housing.
10. An integrated current sensor comprising:
a semiconductor body arranged on a metal substrate, having a first surface with a passivation layer formed on the first surface;
a magnetic field concentrator formed in a flat manner under the semiconductor body;
a first Hall-effect sensor arranged under the passivation layer in the semiconductor body;
a second Hall-effect sensor arranged under the passivation layer in the semiconductor body; and
a first conductor arranged on the first surface separately from and overlapping with, the metal substrate between the first Hall-effect sensor and the second Hall-effect sensor,
wherein the magnetic field concentrator is arranged under the first Hall-effect sensor and under the second Hall-effect sensor and under the first conductor, and
wherein the first Hall-effect sensor is arranged at least in part under a first metal surface in an opening of the passivation layer, and wherein the second Hall effect sensor is arranged at least in part under a second metal surface in an opening in the passivation layer.
11. The integrated current sensor according to claim 10 , further comprising a first wire that is a bond wire and that has a first bond on the first metal surface and a second bond on the second metal surface.
12. The integrated current sensor according to claim 10 , wherein a third metal surface with a third Hall-effect sensor and a fourth metal surface with a fourth Hall-effect sensor are provided in additional openings of the passivation layer, wherein the third metal surface is connected to the fourth metal surface via a ferromagnetic wire, and wherein the first conductor is guided through under the ferromagnetic wire.
13. An integrated current sensor comprising:
a semiconductor body arranged on a metal substrate, having a first surface with a passivation layer formed on the first surface;
a magnetic field concentrator formed in a flat manner under the semiconductor body;
a first Hall-effect sensor arranged under the passivation layer in the semiconductor body;
a second Hall-effect sensor arranged under the passivation layer in the semiconductor body; and
a first conductor arranged on the first surface between the first Hall-effect sensor and the second Hall-effect sensor,
wherein the magnetic field concentrator is arranged under the first Hall-effect sensor and under the second Hall-effect sensor and under the first conductor, and
wherein the first Hall-effect sensor is arranged at least in part under a first metal surface in an opening of the passivation layer, and wherein the second Hall effect sensor is arranged at least in part under a second metal surface in an opening in the passivation layer.