Semiconductor device having trapezoidal shaped trenches
View Patent ↗Provided is a semiconductor capacitor including: a capacitor device forming region having a trapezoidal trench which is formed on a surface of a first conductivity type semiconductor substrate; a second conductivity type lower electrode layer provided along the trapezoidal trenches of the capacitor device forming region; a capacitor insulating film formed at least on a surface of the second conductivity type lower electrode layer; and a second conductivity type upper electrode formed on a surface of the capacitor insulating film.
1. A semiconductor device comprising:
a first conductivity type single-crystal semiconductor substrate;
a capacitor device region in the first conductivity type single-crystal semiconductor substrate and having a surface including a recess bounded by a planar plateau, where the recess includes oxygen-reacted sidewalls aligned with crystal planes of the semiconductor substrate and rounded features, such that the recess defines a trapezoidal shaped trench in the semiconductor substrate;
a second conductivity type lower electrode layer in the planar plateau and the oxygen-reacted sidewalls of the trapezoidal shaped trench;
a capacitor insulating film on a surface of the second conductivity type lower electrode layer; and
a second conductivity type upper electrode layer on a surface of the capacitor insulating film.
2. A semiconductor device according to claim 1 , wherein the surface comprises a corrugated surface including a series of recesses separated by the planar plateau, such that a plurality of trapezoidal trenches reside in parallel to one another in the capacitor device region.