IP Library Patent Application 13560023
Patent Application
App. No. 13/560,023

SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING

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Quick Facts
Patent No.
US None
App. No.
13/560,023
Abstract

A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.

Claims (20)

1 . A method of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.

2 . The method as claimed claim 1 , wherein said mirror substrate includes beryllium.

3 . The method as claimed in claim 1 , wherein said fluid etching agent includes hydrofluoric acid (HF).

4 . The method as claimed in claim 1 , wherein said fluid etching agent includes nitric acid (HNO 3 ).

5 . The method as claimed in claim 1 , wherein said method includes the step of applying a mask to a protected area to prevent etching of the protected area.

6 . The method as claimed in claim 5 , wherein said protected area is a front reflective surface of the mirror.

7 . The method as claimed in claim 1 , wherein said method further includes the step of agitating a bath that includes the beryllium structure and the fluid etching agent.

8 . The method as claimed in claim 7 , wherein said method further includes the step of controlling a rate of agitation of the bath that includes the beryllium and the fluid etching agent to control a shape of the at least one wall section.

9 . The method as claimed in claim 1 , wherein said mirror structure is removed from the fluid etching agent when the mirror reaches a target reduced weight.

10 . The method as claimed in claim 1 , wherein said method further includes the step of drawing the beryllium structure from the fluid etching agent at a controlled rate such that the at least one wall section forms a tapered wall.

11 . The method as claimed in claim 1 , wherein said method provides uniform milling of exposed surfaces of the beryllium structure.

12 . A mirror for use in a limited rotation motor systems formed from the method of claim 1 .

13 . A mirror for use in a limited rotation motor system, said mirror comprising a backing structure opposite a front of the mirror, said backing structure including at least one wall section having a tapered shape that tapers as the wall extends away from the front of the mirror.

14 . The mirror as claimed in claim 13 , wherein said backing structure includes beryllium.

15 . The mirror as claimed in claim 13 , wherein said wall sections are formed by chemical etching.

16 . The mirror as claimed in claim 13 , wherein said tapered shape of the wall section has a thickness of no greater than about 0.25 mm.

17 . The mirror as claimed in claim 13 , wherein said backing structure includes a plurality of hexagonally shaped wall sections each of which is tapered as the wall extends away from the front of the mirror.

18 . A mirror for use in a limited rotation motor system, said mirror comprising a backing structure opposite a front of the mirror, said backing structure including features that provide rigidity to the mirror and that have thicknesses that become reduced in a direction away from the front of the mirror.

19 . The mirror as claimed in claim 18 , wherein said backing structure includes beryllium.

20 . The mirror as claimed in claim 18 , wherein said features have thicknesses of no greater than about 0.25 mm.

Assignments (4)
CHANGE OF NAME Recorded Sep 19, 2017
From: CAMBRIDGE TECHNOLOGY, INC.
To: NOVANTA CORPORATION
Reel/Frame 043919/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 13, 2016
From: CAMBRIDGE TECHNOLOGY, INC.
To: GSI GROUP CORPORATION
Reel/Frame 037513/0367 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 7, 2013
From: GSI GROUP CORPORATION
To: CAMBRIDGE TECHNOLOGY, INC.
Reel/Frame 030956/0336 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2012
From: BROWN, DAVID C.
To: GSI GROUP CORPORATION
Reel/Frame 028834/0203 →