PIEZOELECTRIC VIBRATION DEVICE AND OSCILLATOR
A piezoelectric vibration device is provided that can reduce the stress and strain that transmit through a base substrate. The piezoelectric vibration device includes a piezoelectric vibrating reed that oscillates in an AT mode, and that includes excitation electrodes respectively formed on the front and back surfaces of the reed. One of the excitation electrodes is connected to the base substrate via a metal bump on a center line passing across the shorter sides of the piezoelectric vibrating reed and in the vicinity of one of the shorter sides of the piezoelectric vibrating reed. The other excitation electrode is connected to the base substrate via a metal bump on the same side as the above shorter side, and in the vicinity of a portion where the shorter side of the piezoelectric vibrating reed crosses one of the longer sides of the piezoelectric vibrating reed.
1 . A piezoelectric vibration device, comprising:
a base substrate;
a cover substrate facing and bonded to the base substrate; and
a piezoelectric vibrating reed housed in a cavity formed between the base substrate and the cover substrate, and bump bonded to a top surface of the base substrate,
wherein the piezoelectric vibrating reed is a piezoelectric vibrating reed that oscillates in an AT mode, and that includes excitation electrodes respectively formed on the front and back surfaces of the reed, and mount electrodes electrically connected to the excitation electrodes, respectively,
one of the mount electrodes being electrically connected to the base substrate via a first metal bump on a center line passing across the shorter sides of the piezoelectric vibrating reed and in the vicinity of one of the shorter sides of the piezoelectric vibrating reed, and
the other mount electrode being electrically connected to the base substrate via a second metal bump in the vicinity of a portion where said one of the shorter sides of the piezoelectric vibrating reed crosses one of the longer sides of the piezoelectric vibrating reed.
2 . The piezoelectric vibration device according to claim 1 , wherein one of the mount electrodes is further connected to the base substrate via a third metal bump,
wherein the third metal bump is disposed in the vicinity of said one of the shorter sides of the piezoelectric vibrating reed and on the other longer side opposite said one of the longer sides of the piezoelectric vibrating reed, and
wherein the first metal bump, the second metal bump, and the third metal bump are aligned in a straight line.
3 . The piezoelectric vibration device according to claim 2 , wherein the second metal bump and the third metal bump are equidistant from the first metal bump disposed between the second metal bump and the third metal bump.
4 . An oscillator comprising:
the piezoelectric vibration device of claim 1 ; and
a drive circuit that supplies a drive signal to the piezoelectric vibration device.