Piezoelectric device having first and second non-metal electroconductive intermediate films
View Patent ↗A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.
1. A piezoelectric device comprising:
a first electrode film;
a first nonmetal electroconductive intermediate film provided on the first electrode film;
a piezoelectric film provided on the first nonmetal electroconductive intermediate film;
a second nonmetal electroconductive intermediate film provided on the piezoelectric film; and
a second electrode film provided on the second nonmetal electroconductive intermediate film,
wherein a linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than a linear expansion coefficient of the first electrode film and a linear expansion coefficient of the piezoelectric film,
wherein a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than a linear expansion coefficient of the second electrode film and the linear expansion coefficient of the piezoelectric film, and
wherein there is no substrate 10 μm or more thick on a top surface of the second electrode film and there is no substrate 10 μm or more thick on a bottom surface of the first electrode film, either.
2. The piezoelectric device according to claim 1 , wherein the first and second nonmetal electroconductive intermediate films are in direct contact with the piezoelectric film.
3. The piezoelectric device according to claim 1 , wherein the first and second nonmetal electroconductive intermediate films are inorganic oxide films respectively.
4. The piezoelectric device according to claim 3 , wherein the two inorganic oxide films have the same composition.