Polishing slurry composition
View Patent ↗Provided is a polishing slurry composition, including a non-ionic surfactant represented by the following formula (1) R—(OCH 2 CH 2 ) x —OH formula (1) wherein x is an integer from 1 to 50, and R is selected from a group consisting of a C3-C50 alkyl group, a C6-C55 benzylalkyl group and a C6-C55 phenylalkyl group.
1. A polishing slurry composition, comprising a non-ionic surfactant represented by formula (1),
R—(OCH 2 CH 2 ) x —OH formula (1)
wherein x is an integer between 1 and 50, and
R is selected from a group consisting of a C3-C50 alkyl group, a C6-C55 benzylalkyl group and a C6-C55 phenylalkyl group, and wherein the non-ionic surfactant is a secondary alcohol ethoxylate, a pH value of the polishing slurry composition is between 5 and 11, and based on a total weight of the polishing slurry composition, a content of the non-ionic surfactant is between 5 ppm and 100 ppm.
2. The polishing slurry composition of claim 1 , wherein x is an integer between 7 and 40.
3. The polishing slurry composition of claim 1 , wherein the non-ionic surfactant is represented by formula (2),
wherein m+n is an integer between 2 and 15.
4. The polishing slurry composition of claim 1 , further comprising an oxidizing agent.
5. The polishing slurry composition of claim 4 , wherein the oxidizing agent is one or more selected from a group consisting of permanganate salt, peroxyacid, iodate salt, oxybromide salt, ceric salt, bromate salt, hydrogen peroxide, chlorite salt and hypochlorite salt.
6. The polishing slurry composition of claim 4 , wherein based on a total weight of the polishing slurry composition, a content of the oxidizing agent is between 0.5% and 10%.
7. The polishing slurry composition of claim 1 , further comprising polishing particles.
8. The polishing slurry composition of claim 7 , wherein based on a total weight of the polishing slurry composition, a content of the polishing particles is between 100 ppm and 5000 ppm.
9. The polishing slurry composition of claim 7 , wherein an average diameter of the polishing particles is between 5 nm and 300 nm.
10. The polishing slurry composition of claim 7 , wherein an average diameter of the polishing particles is between 5 nm and 100 nm.
11. The polishing slurry composition of claim 7 , wherein the polishing particles comprise one or more selected from a group consisting of silicon dioxide, aluminum oxide, cerium oxide, zirconium dioxide and titanium dioxide.
12. The polishing slurry composition of claim 1 , further comprising a pH adjustor.
13. The polishing slurry composition of claim 12 , wherein the pH adjustor is one or more selected from a group consisting of potassium hydroxide, triethanolamine, 2,2,2-nitrilotriethanol, nitric acid, sulfuric acid, oxalic acid and citric acid.
14. The polishing slurry composition of claim 12 , wherein a content of the pH adjustor is between 5 ppm and 10,000 ppm based on a total weight of the polishing slurry composition.
15. The polishing slurry composition of claim 1 , further comprising a chelating agent.
16. The polishing slurry composition of claim 15 , wherein the chelating agent comprises inorganic acids, organic acids or amino acids.
17. The polishing slurry composition of claim 16 , wherein the chelating agent is one or more selected from a group consisting of citric acid, diethylenetriaminepentaacetate, ammonium oxlate, tartaric acid, oxalic acid, maleic acid, lactic acid, succinic acid, histidine, alanine, glycine, aspartate, glutamine, serine and arginine.
18. The polishing slurry composition of claim 15 , wherein a content of the chelating agent is between 0.1% and 10% based on a total weight of the polishing slurry composition.
19. The polishing slurry composition of claim 1 , further comprising an corrosion inhibitor.
20. The polishing slurry composition of claim 19 , wherein said corrosion inhibitor is one or more selected from a group that consists of 1-H-benzotriazole, N-acyl sarcosinate, ammonium dodecylsulfate, tolyltriazole, 5-amino tetrazole, 3-amino-1,2,4-triazole, 4-amino-4H-1,2,4-triazole, 3-nitro-1,2,4-triazole, 3-mercapto-1,2,4-triazole, 1H-1,2,3-triazole-ethanol, benzimidazole, imidazole, pyrrole, pyrroline, oxazole, isoxazole, indazole, indolizine, 1,2,3-triazole, 1,2,4-triazole, methylbenzotriazole, 2-mercaptobenzothiazole, benzylidene dioxotetrahydro thiazole, thenylidene dioxotetrahydro thiazole and dodecylbenzene sulfonic acid.
21. The polishing slurry composition of claim 19 , wherein a content of the corrosion inhibitor is between 1 ppm and 1000 ppm based on a total weight of the polishing slurry composition.
22. The polishing slurry composition of claim 1 , further comprising an aqueous carrier.
23. The polishing slurry composition of claim 22 , wherein a content of the aqueous carrier is between 50% and 99% based on a total weight of the polishing slurry composition.
24. The polishing slurry composition of claim 22 , wherein the aqueous carrier comprises deionized water.