Method of making an energy-assisted magnetic recording apparatus
View Patent ↗A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.
1. A method of making an energy-assisted magnetic recording apparatus, comprising the steps of:
aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads; and
bonding the first wafer to the second wafer.
2. The method of claim 1 , further comprising the steps of:
etching the first wafer to expose the plurality of VCSELs; and
after the first and second wafers are bonded dicing the second wafer to separate the plurality of magnetic recording heads.
3. The method of claim 1 , wherein each of the VCSELs is configured to emit laser light perpendicular to an interface surface between the first wafer and the second wafer.
4. The method of claim 1 , wherein the light redirecting structure of each of the plurality of magnetic recording heads includes a mirror configured to reflect the laser light towards an end surface of the magnetic recording head.
5. The method of claim 4 , wherein the mirror comprises a film of metal selected from the group consisting of aluminum (Al), silver (Ag), gold (Au) and copper (Cu).
6. The method of claim 1 , wherein the light redirecting structure of each of the plurality of magnetic recording heads includes a waveguide.
7. The method of claim 6 , wherein the light redirecting structure of each of the plurality of magnetic recording heads comprises a diffractive grating to couple the laser light into the waveguide.
8. The method of claim 6 , wherein the waveguide includes a core layer and a cladding layer, and wherein the core layer has a higher refractive index than a refractive index of the cladding layer.
9. The method of claim 8 , wherein the light redirecting structure of each of the plurality of magnetic recording heads comprises a diffractive grating to couple the laser light into the core layer of the waveguide.
10. The method of claim 1 , wherein each of the plurality of VCSELs includes one or more contact pads for providing power to the VCSEL.
11. The method of claim 1 , wherein each of the plurality of VCSELs includes one or more contact pads for bonding the first wafer to the second wafer.