Angular speed sensor for detecting angular speed
View Patent ↗A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.
1. An angular velocity sensor comprising:
a package;
an angular velocity sensor element disposed in the package and having a vibration plane;
a seat that supports the angular velocity sensor element to ensure a vibrating space of the angular velocity sensor element; and
a vibration-proof member that suspends the seat in an internal space of the package, wherein
the vibration-proof member includes:
a connection portion to the package; and
a suspension portion located between the connection portion and a connection portion to the seat, and a height of a barycentric position of the suspension portion is matched with a height of a barycentric position of a composite body including the angular velocity sensor element, the seat, and connection portion to the seat in the vibration-proof member;
wherein the suspension portion has a step-shaped structure including a first surface and a second surface, the first surface disposed parallel to the vibration plane of the angular velocity sensor and the second surface disposed orthogonal to the vibration plane of the angular velocity sensor; and
wherein the height of the barycentric position of the suspension portion and the height of the barycentric position of the composite body are matched based on the vibration lane in a driving vibration of the angular velocity sensor element.
2. The angular velocity sensor according to claim 1 , wherein
the vibration-proof member and the seat are integrally molded using an elastic material.
3. The angular velocity sensor according to claim 1 , wherein
the vibration-proof member is made of a liquid crystal polymer.
4. The angular velocity sensor according to claim 1 , wherein
the vibration-proof member is made of polyphthalamide.
5. The angular velocity sensor according to claim 1 , wherein
the vibration-proof member is made of silicon.
6. The angular velocity sensor according to claim 1 , wherein
the vibration-proof member is made of a plate-spring material, and the connection portion to the seat is molded in the seat.
7. The angular velocity sensor according to claim 1 , wherein
the angular velocity sensor includes at least two of the vibration-proof members which are disposed on opposite sides of the angular velocity sensor element in each vibration direction, respectively.