Light emitting diode chip
View Patent ↗A light emitting diode chip includes a semiconductor layer sequence, the semiconductor layer sequence having an active layer that generates electromagnetic radiation, wherein the light emitting diode chip has a radiation exit area at a front side. At a rear side lying opposite the radiation exit area, the light emitting diode chip has, at least in regions, a mirror layer containing silver. A functional layer that reduces corrosion and/or improves adhesion of the mirror layer is arranged on the mirror layer, wherein a material from which the functional layer is formed is also distributed in the entire mirror layer. The material of the functional layer has a concentration gradient in the mirror layer, wherein the concentration of the material of the functional layer in the mirror layer decreases proceeding from the functional layer in the direction toward the semiconductor layer sequence.
1. A light emitting diode chip comprising a semiconductor layer sequence which has an active layer that generates electromagnetic radiation, wherein
the light emitting diode chip has a radiation exit area at a front side,
the light emitting diode chip has, at a rear side lying opposite the radiation exit area, at least in regions, a mirror layer containing silver,
a functional layer that reduces corrosion and/or improves adhesion of the mirror layer is arranged on the mirror layer,
a material from which the functional layer is formed is distributed in the entire mirror layer, wherein the material of the functional layer has a concentration gradient in the mirror layer, and
a concentration of the material of the functional layer in the mirror layer decreases proceeding from the functional layer in a direction toward the semiconductor layer sequence, wherein the functional layer has a thickness of 10 nm to 100 nm.
2. The light emitting diode chip according to claim 1 , wherein the mirror layer directly adjoins the semiconductor layer sequence.
3. The light emitting diode chip according to claim 1 , wherein the functional layer contains platinum.
4. The light emitting diode chip according to claim 1 , wherein the functional layer contains nickel, chromium, palladium, rhodium or a transparent conductive oxide.
5. The light emitting diode chip according to claim 1 , wherein the mirror layer is part of a reflective contact layer sequence, which has, preceding from the semiconductor layer sequence, at least the following layers in the stated order:
the mirror layer containing silver,
the functional layer that reduces corrosion and/or improves adhesion of the mirror layer,
a diffusion barrier layer, and
a first electrical connection layer.
6. The light emitting diode chip according to claim 5 , wherein the first electrical connection layer contains gold.
7. The light emitting diode chip according to claim 5 , wherein the diffusion barrier layer contains titanium, chromium, nickel, palladium, titanium nitride or titanium tungsten nitride.
8. The light emitting diode chip according to claim 5 , wherein an adhesion layer is arranged between the diffusion barrier layer and the first electrical connection layer.
9. The light emitting diode chip according to claim 8 , wherein the adhesion layer contains platinum, titanium or chromium.
10. The light emitting diode chip according to claim 1 , wherein
the light emitting diode chip has a first electrical connection layer and a second electrical connection layer,
the first electrical connection layer and the second electrical connection layer face the rear side of the semiconductor layer sequence and are electrically insulated from one another by a passivation layer,
a partial region of the second electrical connection layer extends from the rear side of the semiconductor layer sequence through at least one perforation of the active layer in a direction toward the front side,
the second electrical connection layer contains silver and functions as a second mirror layer,
a second functional layer that reduces corrosion and/or improves adhesion of the second electrical connection layer is arranged on the second electrical connection layer, wherein a material from which the second functional layer is formed is contained in the second electrical connection layer.
11. The light emitting diode chip according to claim 10 , wherein the second electrical connection layer is, at least in regions, part of a layer sequence containing at least the following layers in the stated order:
the passivation layer,
the second electrical connection layer,
the second functional layer,
a diffusion barrier layer, and
a solder layer.
12. The light emitting diode chip according to claim 11 , wherein the light emitting diode chip connects, at a side lying opposite the radiation exit area, to a carrier by means of the solder layer.
13. A light emitting diode chip comprising a semiconductor layer sequence which has an active layer that generates electromagnetic radiation, wherein
the light emitting diode chip has a radiation exit area at a front side,
the light emitting diode chip has, at a rear side lying opposite the radiation exit area, at least in regions, a mirror layer containing silver,
a functional layer that reduces corrosion and/or improves adhesion of the mirror layer is arranged on the mirror layer,
a material from which the functional layer is formed is distributed in the entire mirror layer, wherein the material of the functional layer has a concentration gradient in the mirror layer,
a concentration of the material of the functional layer in the mirror layer decreases proceeding from the functional layer in a direction toward the semiconductor layer sequence,
the mirror layer directly adjoins the semiconductor layer sequence, and
the functional layer has a thickness of 10 nm to 100 nm.
14. The light emitting diode chip according to claim 13 , wherein the functional layer contains platinum.
15. The light emitting diode chip according to claim 13 , wherein the functional layer contains nickel, chromium, palladium, rhodium or a transparent conductive oxide.
16. The light emitting diode chip according to claim 13 , wherein the mirror layer is part of a reflective contact layer sequence, which has, preceding from the semiconductor layer sequence, at least the following layers in the stated order:
the mirror layer containing silver,
the functional layer that reduces corrosion and/or improves adhesion of the mirror layer,
a diffusion barrier layer, and
a first electrical connection layer.
17. The light emitting diode chip according to claim 13 , wherein
the light emitting diode chip has a first electrical connection layer and a second electrical connection layer,
the first electrical connection layer and the second electrical connection layer face the rear side of the semiconductor layer sequence and are electrically insulated from one another by a passivation layer,
a partial region of the second electrical connection layer extends from the rear side of the semiconductor layer sequence through at least one perforation of the active layer in a direction toward the front side,
the second electrical connection layer contains silver and functions as a second mirror layer,
a second functional layer that reduces corrosion and/or improves adhesion of the second electrical connection layer is arranged on the second electrical connection layer, wherein a material from which the second functional layer is formed is contained in the second electrical connection layer.