IP Library Granted Patent US 9,047,500
Granted Patent B2
US 9,047,500 · App. 13/584,528 · Granted Jun 2, 2015

Integrated thin film imager for bright field, dark field, and frustrated total internal reflection imaging

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,047,500
App. No.
13/584,528
Granted
Jun 2, 2015
Kind
B2
Abstract

An optical imaging system includes a thin film imager that is able to create images of objects in various modes of imaging such as bright field, dark field, frustrated total internal reflection, fly eye, and the like. The imaging system may be an integrated optical design that performs different modes of optical imaging in the same imaging device by positioned pin hole structures in geometries that capture images according to the desired mode of imaging.

Claims (31)

1. An integrated imaging system, comprising:

a light source that emits light toward an object to be imaged;

a thin film light-blocking layer having at least one hole such that at least a portion of the light reflected off of the object to the imaged is received through the hole of the thin film light blocking layer; and

a photo sensor positioned to detect the reflected light that travels through the hole of the thin film light-blocking layer.

2. The integrated imaging system of claim 1 , wherein the thin film light-blocking layer is a thin film metal layer.

3. The integrated imaging system of claim 2 , wherein the photo sensor includes a top biasing contact and a bottom biasing contact, and wherein the top biasing contact, the bottom biasing contact, and the thin film light-blocking layer each include at least one common material.

4. The integrated imaging system of claim 1 , wherein the thin film light-blocking layer includes at least one of silicon, metal, SiOxNy, amorphous carbon, and polyimide.

5. The integrated imaging system of claim 1 , further including a substrate secured to the thin film light-blocking layer.

6. The integrated imaging system of claim 5 , wherein the substrate is flexible.

7. The integrated imaging system of claim 5 , wherein the substrate is positioned between the thin film light-blocking layer and the photo sensor.

8. The integrated imaging system of claim 5 , wherein the thin film light-blocking layer is spaced apart from the object to be imaged, and wherein the light source is positioned on the same side of the thin film light-blocking layer as the object to be imaged such that light emitted toward the object to be imaged is reflected off of the object to the imaged through the hole.

9. The integrated imaging system of claim 5 , wherein the thin film light-blocking layer is positioned adjacent to the object to be imaged, and wherein the light source is positioned on the opposite side of the photo sensor from the substrate and the thin film light-blocking layer, such that the light source emits light through a hole in a photo sensor layer that includes the photo sensor, through the substrate, and through the hole in the thin film light-blocking layer that is then reflected off of the object to be imaged and detected by the photo sensor.

10. The integrated imaging system of claim 9 , wherein the hole of the photo sensor layer is aligned with the hole of the thin film light-blocking layer.

11. The integrated imaging system of claim 10 , wherein the integrated imaging system is positioned so that the thin film light-blocking layer and the photo sensor are curved to form a fly eye imaging device.

12. The integrated imaging system of claim 9 , wherein the hole of the photo sensor layer is offset from the hole of the thin film light-blocking layer.

13. The integrated imaging system of claim 12 , wherein the thin film light-blocking layer blocks a direct light path from the light source so at least a portion of the light is received through the hole of the thin film light-blocking layer.

14. The integrated imaging system of claim 9 , wherein an angle at which the light contacts the object to be imaged is greater than a critical angle of the boundary between the thin film light-blocking layer and the object.

15. A method of imaging, comprising:

emitting light from a light source toward an object to be imaged;

receiving at least a portion of the emitted light through a hole in a thin film light-blocking layer, wherein the at least a portion of the emitted light includes light reflected off of the object to be imaged; and

detecting the reflected light that travels through the hole of the thin film light-blocking layer.

16. The method of claim 14 , wherein the thin film light-blocking layer is spaced apart from the object to be imaged, and wherein the light source is positioned on the same side of the thin film light-blocking layer as the object to be imaged, such that light emitted toward the object to be imaged is reflected off of the object to the imaged through the hole in the thin film light-blocking layer.

17. The method of claim 14 , further comprising a substrate secured to the thin film light-blocking layer, wherein the substrate is positioned between the thin film light-blocking layer and the photo sensor.

18. The thin film imager of claim 16 , wherein the thin film light-blocking layer is positioned adjacent to the object to be imaged, and wherein the light source is positioned on the opposite side of the photo sensor from the substrate and the thin film light-blocking layer, such that a pathway of the light emitted from the light source extends through a hole in a photo sensor layer that includes the photo sensor, through the substrate, and through the hole in the thin film light-blocking layer that is then reflected off of the object to be imaged and detected by the photo sensor.

19. The thin film imager of claim 17 , wherein the hole of the photo sensor layer is aligned with the hole of the thin film light-blocking layer.

20. An imaging system, comprising:

a thin film imager, comprising:

a light source that emits light toward an object to be imaged;

a thin film light-blocking layer having at least one hole such that at least a portion of the light reflected off of the object to the imaged is permitted to travel through the hole of the thin film light block; and

a photo sensor positioned to detect the reflected light that travels through the hole of the thin film light-blocking layer,

wherein the thin film imager is operable in at least two of a bright field, a dark field, and a total internal reflection imaging of the object to be imaged.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073842/0479 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2012
From: LU, JENG PING
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 028777/0837 →