Semiconductor device including Schottky barrier diode
In a non-insulated DC-DC converter having a circuit in which a power MOS•FET high-side switch and a power MOS•FET low-side switch are connected in series, the power MOS•FET low-side switch and a Schottky barrier diode to be connected in parallel with the power MOS•FET low-side switch are formed within one semiconductor chip. The formation region SDR of the Schottky barrier diode is disposed in the center in the shorter direction of the semiconductor chip, and on both sides thereof, the formation regions of the power MOS•FET low-side switch are disposed. From the gate finger in the vicinity of both long sides on the main surface of the semiconductor chip toward the formation region SDR of the Schottky barrier diode, a plurality of gate fingers are disposed so as to interpose the formation region SDR between them.
1. A semiconductor device comprising:
a semiconductor chip including a schottky barrier diode and a plurality of power MOSFETs which are formed on a single semiconductor substrate;
the semiconductor substrate having a first long side, a second long side located on the opposite side of the first long side, a first short side and a second short side located on the opposite side of the first short side;
the schottky barrier diode formed in a first region of the semiconductor substrate; and
the plurality of power MOSFETs formed in a second region of the semiconductor substrate,
wherein the first region is closer to the first short side than a central portion of the semiconductor substrate and is arranged between the first short side and the second region,
wherein the second region is arranged between the first region and the second short side,
wherein each of the power MOSFETs has a gate electrode, a drain region and a source region,
wherein each of the gate electrodes is embedded in a trench formed in the semiconductor substrate,
wherein a first pad is formed over the power MOSFETs and the schottky barrier diode, and is electrically connected to the source region and the schottky barrier diode, and
wherein a gate wiring is electrically connected to the gate electrode and surrounds the first pad in a planar view; and
wherein the schottky barrier diode is surrounded at four sides by the gate wiring in a planar view.
2. The semiconductor device according to the claim 1 ,
wherein, in planar view, a part of the gate wiring is arranged between the first region and the first short side, between the first region and the first long side and between the first region and the second long side.
3. The semiconductor device according to the claim 2 ,
wherein the power MOSFETs are not formed in the first region, and
wherein the schottky barrier diode is not formed in the second region.
4. A semiconductor device comprising:
a semiconductor chip including a schottky barrier diode and a plurality of power MOSFETs which are formed on a single semiconductor substrate;
the semiconductor substrate having a first long side, a second long side located on the opposite side of the first long side, a first short side and a second short side located on the opposite side of the first short side;
the schottky barrier diode formed in a first region of the semiconductor substrate; and
the plurality of power MOSFETs formed in a second region of the semiconductor substrate,
wherein the first region is closer to the first short side than a central portion of the semiconductor substrate and is arranged between the first short side and the second region,
wherein the second region is arranged between the first region and the second short side,
wherein the first region abuts to the first short side, the first long side and the second long side without the second region being between the first region and any of the first short side, the first long side, and the second long side,
wherein each of the power MOSFETs has a gate electrode, a drain region and a source region,
wherein each of the gate electrodes is embedded in a trench formed in the semiconductor substrate,
wherein a first pad is formed over the power MOSFETs and the schottky barrier diode, and is electrically connected to the source region and the schottky barrier diode, and
wherein a gate wiring is electrically connected to the gate electrode and surrounds the first pad in a planar view; and
wherein the schottky barrier diode is surrounded at four sides by the gate wiring in a planar view.
5. The semiconductor device according to the claim 4 ,
wherein, in planar view, a part of the gate wiring is arranged between the first region and the first short side, between the first region and the first long side and between the first region and the second long side.
6. The semiconductor device according to the claim 5 ,
wherein the power MOSFETs are not formed in the first region, and
wherein the schottky barrier diode is not formed in the second region.