Substrate processing method
In a substrate processing apparatus ( 1 ), a silicon oxide film on a main surface of a substrate ( 9 ) is removed in an oxide film removing part ( 4 ) and then a silylation material is applied to the main surface, to thereby perform a silylation process in a silylation part ( 6 ). It is thereby possible to lengthen the Q time from the removal of the silicon oxide film to the formation of the silicon germanium film and reduce the temperature for prebaking in the formation of the silicon germanium film.
1. A substrate processing method for processing a silicon substrate, comprising the steps of:
a) removing a silicon oxide film from a main surface of a silicon substrate;
b) applying a silylation material to said main surface to thereby perform a silylation process thereon so that the silylated main surface is in a state where growth of a natural oxide film is suppressed, and
c) performing a process for forming a silicon germanium film, on said main surface, wherein
said step b) is performed without moving said silicon substrate after said step a),
said step a) comprises the steps of
a1) applying a removal liquid used for removing said silicon oxide film, onto said main surface; and
a2) applying a rinse liquid onto said main surface,
wherein oxygen concentration in at least one of said removal liquid and said rinse liquid which includes dissolved inert gas, is reduced to 20 ppb or less.
2. The substrate processing method according to claim 1 , wherein a pattern for transistors is formed on said silicon substrate.
3. The substrate processing method according to claim 1 , wherein
said step c) includes formation of silicon germanium film on said main surface by prebaking and a thermal CVD method.
4. The substrate processing method according to claim 1 , wherein
said silylation process in said step b) causes a state where silyl groups due to said silylation material are present over said main surface from which said silicon oxide film is removed.
5. The substrate processing method according to claim 1 , wherein
a time period from completion of said step a) to start of said step c) is set to forty-eight hours.
6. A substrate processing method for processing a silicon substrate, comprising the steps of:
a) removing a silicon oxide film from a main surface of a silicon substrate;
b) applying a silylation material to said main surface to thereby perform a silylation process thereon, and
c) performing a process for forming a silicon germanium film, on said main surface, wherein
said step a) is performed in an oxide film removing part, said step b) is performed in a silylation part, and said silicon substrate is moved from said oxide film removing part to said silylation part between said steps a) and b),
said step a) comprises the steps of
a1) applying a removal liquid used for removing said silicon oxide film, onto said main surface; and
a2) applying a rinse liquid onto said main surface,
wherein oxygen concentration in at least one of said removal liquid and said rinse liquid which includes dissolved inert gas, is reduced to 20 ppb or less.
7. The substrate processing method according to claim 6 , wherein a pattern for transistors is formed on said silicon substrate.
8. The substrate processing method according to claim 6 , wherein
said step c) includes formation of silicon germanium film on said main surface by prebaking and thermal CVD method.
9. The substrate processing method according to claim 6 , wherein
said silylation process in said step b) causes a state where silyl groups due to said silylation material are present over said main surface from which said silicon oxide film is removed.
10. The substrate processing method according to claim 6 , wherein
a time period from completion of said step a) to start of said step c) is set to forty-eight hours.