IP Library Granted Patent US 8,759,979
Granted Patent B2
US 8,759,979 · App. 13/598,303 · Granted Jun 24, 2014

Semiconductor memory device having dummy conductive patterns on interconnection

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Quick Facts
Patent No.
US 8,759,979
App. No.
13/598,303
Granted
Jun 24, 2014
Kind
B2
Abstract

A semiconductor memory device having a cell pattern formed on an interconnection and capable of reducing an interconnection resistance and a fabrication method thereof are provided. The semiconductor device includes a semiconductor substrate in which a cell area, a core area, and a peripheral area are defined and a bottom structure is formed, a conductive line formed on an entire structure of the semiconductor substrate, a memory cell pattern formed on the conductive line in the cell area, and a dummy conductive pattern formed on any one of the conductive line in the core area and the peripheral area.

Claims (14)

1. A semiconductor memory device, comprising:

a semiconductor substrate in which a cell area, a core area, and a peripheral area are defined and a bottom structure is formed;

a conductive line formed on an entire structure of the semiconductor substrate;

a memory cell pattern formed on the conductive line in the cell area; and

a dummy conductive pattern formed on any one of the conductive line in the core area and the peripheral area and serving as a parallel resistance component against the conductive line.

2. The semiconductor memory device of claim 1 , wherein the cell pattern includes an access element electrically connected to the conductive line in the cell area, and

the dummy conductive pattern has the same structure as the access element.

3. The semiconductor memory device of claim 1 , wherein the cell pattern has a stacked structure, and a bottom structure of the cell pattern has the same structure as the dummy conductive pattern.

4. A semiconductor memory device, comprising:

a word line in a cell area; and

a dummy pattern in a core area or a peripheral area,

wherein the word line and the dummy pattern have the same structure and the same height from a semiconductor substrate level, and

the dummy pattern serves as a parallel resistance component against the conductive line.

5. The semiconductor memory device of claim 4 , further comprising a memory cell pattern located on the word line in the cell area.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2024
From: SK HYNIX INC.
To: MIMIRIP LLC
Reel/Frame 067335/0246 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2012
From: LEE, JANG UK
To: SK HYNIX INC.
Reel/Frame 028871/0919 →