Methods of forming diodes
View Patent ↗Some embodiments include methods of forming diodes in which a first electrode is formed to have a pedestal extending upwardly from a base. At least one layer is deposited along an undulating topography that extends across the pedestal and base, and a second electrode is formed over the least one layer. The first electrode, at least one layer, and second electrode together form a structure that conducts current between the first and second electrodes when voltage of one polarity is applied to the structure, and that inhibits current flow between the first and second electrodes when voltage having a polarity opposite to said one polarity is applied to the structure. Some embodiments include diodes having a first electrode that contains two or more projections extending upwardly from a base, having at least one layer over the first electrode, and having a second electrode over the at least one layer.
1. A method of forming a diode, comprising:
forming a first electrode having an undulating topography, the undulating topography comprising a lowest surface and a highest surface; the highest surface being above the lowest surface by a distance, wherein the forming the first electrode comprises:
etching an opening that extends through an insulative material and to an electrically conductive base;
forming at least one sidewall spacer along sidewalls of the opening to narrow the opening, the base being exposed along a bottom of the narrowed opening; and
dispersing seed material along the bottom of the narrowed opening, at least some of the seed material contacting the sidewall spacer;
conformally depositing one or more layers across the undulating topography, the one or more layers together having a thickness that is less than or equal to about 10% of the distance;
forming a second electrode over said one or more layers; and
wherein the first electrode, one or more layers, and second electrode together form a diode.
2. The method of claim 1 wherein the conformally depositing the one or more layers comprises atomic layer deposition.
3. The method of claim 1 wherein the forming the first electrode comprises:
forming an electrically conductive material over and directly against an electrically conductive base; and
etching the electrically conductive material to form the electrically conductive material into at least one projection that extends upwardly from the base.
4. The method of claim 3 wherein the electrically conductive material comprises a same composition as the base.
5. The method of claim 3 wherein the electrically conductive material comprises a different composition from the base.
6. The method of claim 1 wherein the forming the first electrode further comprises growing pedestals from the dispersed seed material, the pedestals being spaced from one another by valleys, the undulating topography extending across the pedestals and valleys.
7. The method of claim 6 wherein the dispersed seed material consists of nanocrystalline seeds.
8. The method of claim 6 further comprising removing the at least one sidewall spacer after dispersing the seed material.
9. The method of claim 1 wherein the distance is at least about 50 nanometers.
10. The method of claim 9 wherein the thickness is from about 1 nanometer to about 4 nanometers.