Stacked semiconductor devices and fabrication method/equipment for the same

1. A fabrication method of providing stacked semiconductor devices from a semiconductor wafer having multiple chip areas and dicing areas, comprising the steps of:

forming a surface protection and adhesive layer onto a circuit side of the semiconductor wafer;

forming an opening through the surface protection and adhesive layer to expose respective electrode pads on the circuit side of the multiple chip areas and the dicing areas;

partitioning the semiconductor wafer into a plurality of individual chips that include first and second semiconductor chips;

positioning a non-circuit side of the semiconductor wafer on a support sheet;

holding a first semiconductor chip on a suction collet and removing the first semiconductor chip from the support sheet, positioning the first semiconductor chip on an adhesive layer of a receiving substrate, and heating the receiving substrate to bond the first semiconductor chip to the receiving substrate; and

holding a second semiconductor chip on the suction collet and removing the second semiconductor chip from the support sheet, positioning the second semiconductor chip directly on the surface protection and adhesive layer of the first semiconductor chip, and bonding the first semiconductor chip to the second semiconductor chip, wherein

the suction collet has a suction side with lower adhesion to the surface protection and adhesive layer than that between the first semiconductor chip and the second semiconductor chip.

2. The fabrication method of stacked semiconductor devices according to claim 1 , wherein

the suction side of the suction collet is made of silicon rubber, and

the surface roughness of the suction face is in the range of 0.1 to 100 μm with arithmetic average roughness Ra.

3. The fabrication method of stacked semiconductor devices according to claim 1 , wherein

at the time of raising the suction collet after bonding the first semiconductor chip to the second semiconductor chip, at least one of scrubbing the suction collet and rapid cooling by blowing cooling air to the suction collet is executed.

4. The fabrication method of stacked semiconductor devices according to claim 1 , wherein

the step of partitioning the semiconductor wafer comprises the steps of:

forming a ditch along the dicing areas,

adhering a protection tape to the circuit side of the semiconductor wafer,

grinding the non-circuit side of the semiconductor wafer to partition the semiconductor wafer into the plurality of individual chips,

adhering the support sheet to the non-circuit side of the semiconductor wafer, and

peeling off the protection tape.

5. The fabrication method of claim 1 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a hardness in the range of 30 to 100, measured based on the vulcanized rubber and thermoplastic rubber hardness test method according to JIS K-6253.

6. The fabrication method of claim 1 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a contact angle in the range of 90to 170 degrees to pure water.

7. The fabrication method of claim 1 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a fluorine based resin coating thereon.

8. The fabrication method of claim 1 , further including the step of electrically connecting a connecting part of the receiving substrate and the electrode pads of the first and second semiconductor chips.

9. The fabrication method of claim 1 , further including, prior to the step of forming the ditch in the semiconductor wafer, the steps of:

selectively exposing portions of the surface protection and adhesive layer to light;

developing the exposed portions of the surface protection and adhesion layer to remove portions of the surface protection and adhesive layer overlying the area of the ditch to be formed.

10. The fabrication method of claim 9 , further including exposing the electrode pads on the circuit side of the multiple chip areas when removing portions of the surface protection and adhesive layer.

11. The method of claim 10 , further including the step of electrically interconnecting at least one bond at a location where the surface protection and adhesive layer is not present on at least one of the first and the second semiconductor chips to the underlying support sheet.

12. A manufacturing apparatus of semiconductor devices comprising:

a pickup section configured to sequentially pick up a plurality of semiconductor chips formed on a semiconductor wafer including:

a first semiconductor chip where a first photosensitive surface protection film and adhesive layer is formed on a circuit side thereof, and

a second semiconductor chip where a second photosensitive surface protection film and adhesive layer is formed on a circuit side thereof, and

a chip bonding section where the first semiconductor chip picked up by the suction collet is to be bonded to a substrate, and

the second semiconductor chip picked up by the suction collet is disposed onto the first semiconductor chip and

directly bonded to the first semiconductor chip by the first photosensitive surface protection film and adhesive layer,

wherein the suction collet has lower adhesion to the either of the first and second photosensitive surface protection film and adhesive layers than that between the first and second semiconductor chips.

13. The manufacturing apparatus of semiconductor devices according to claim 12 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a hardness in the range of 30 to 100, measured based on the vulcanized rubber and thermoplastic rubber hardness test method according to JIS K-6253.

14. The manufacturing apparatus of semiconductor devices according to claim 12 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a contact angle in the range of 90 to 170 degrees to pure water.

15. The manufacturing apparatus of semiconductor devices according to claim 12 , wherein the suction collet has an elastomeric surface, and said elastomeric surface has a fluorine based resin coating thereon.