IP Library Granted Patent US 9,171,746
Granted Patent B2
US 9,171,746 · App. 13/602,322 · Granted Oct 27, 2015

Heater elements with enhanced cooling

Inventor: Arsalan Emami (Aliso Viejo, CA)
H01L21/67109F27B5/08F27D1/0006H01L21/67098H01L23/467F27D2009/0005
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Quick Facts
Patent No.
US 9,171,746
App. No.
13/602,322
Granted
Oct 27, 2015
Kind
B2
Abstract

A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

Claims (40)

1. A heater insulation, comprising

a layer of insulation material, wherein the layer of insulation is configured to insulate a heater element from an outside ambient;

one or more channels disposed within the layer of insulation, wherein the plurality of channels passes through along a length of the layer of insulation;

a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet;

a restrictor assembly coupled to the plurality of channels,

wherein the restrictor assembly is configured to adjustably change a flow rate of the plurality of channels; and

a locking assembly coupled to the restrictor assembly,

wherein the locking assembly is configured to fixedly couple the restrictor assembly to the layer of insulation.

2. A heater insulation as in claim 1 wherein the plurality of channels comprises straight lines or curved lines passing along the length of the layer of insulation.

3. A heater insulation as in claim 1 further comprising

a controller assembly coupled to the restrictor assembly, wherein the controller assembly is configured to automatically adjust the flow rate of the plurality of channels.

4. A heater insulation as in claim 1 further comprising

a blower assembly coupled to the inlet of the manifold.

5. A heater insulation as in claim 1 wherein the plurality of channels is vacuum formed within the layer of insulation.

6. A heater insulation as in claim 1 further comprising

one or more tubes disposed in the layer of insulation.

7. A system comprising

a heater;

a layer of insulation material, wherein the layer of insulation is configured to insulate the heater from an outside ambient;

one or more channels disposed within the layer of insulation, wherein the plurality of channels passes through along a length of the layer of insulation;

a manifold coupled to the plurality of channels, wherein the manifold comprises an inlet;

a restrictor assembly coupled to the plurality of channels,

wherein the restrictor assembly is configured to adjustably change the flow rate of the plurality of channels; and

a locking assembly coupled to the restrictor assembly,

wherein the locking assembly is configured to fixedly couple the restrictor assembly to the layer of insulation.

8. A system as in claim 7 further comprising

a quartz tubes, wherein the heater is disposed outside the quartz tube.

9. A system as in claim 7 further comprising

a controller assembly coupled to the restrictor assembly, wherein the controller assembly is configured to automatically adjust the flow rate of the plurality of channels.

10. A system as in claim 7 further comprising

a blower assembly coupled to the inlet of the manifold.

11. A method for controllably heating a chamber, the method comprising

turning on a heater for heating the chamber;

turning on a fluidic flow, at least during a portion of the time the heater is turned on, through one or more channels within an insulation layer, wherein the insulation layer covers the heater to insulate the chamber; and

wherein the fluidic flow is adjusted by varying outlet openings of the plurality of channels.

12. A method as in claim 11 wherein the fluidic flow comprises a gas flow or a liquid flow.

13. A method as in claim 11 wherein the fluidic flow is manually adjusted.

14. A method as in claim 11 wherein the fluidic flow is automatically adjusted through a controller.

15. A method as in claim 11 further comprising

flowing the fluidic flow through a heat exchanger before or after the fluidic flow entering or exiting the plurality of channels.

Continuity (2)
Provisional Application 61573450 · Sep 6, 2011
Related Publication 20130062333A1 · Mar 14, 2013