Fabricating method of organic electro-luminescence display unit
A fabricating method of an organic electroluminescent display unit is provided. A gate and a gate insulating layer covering the gate are formed on the substrate. A patterned metal-oxide layer with an etching stop layer thereon is formed on the gate insulating layer. A surface treatment is performed on the patterned metal-oxide layer with use of the etching stop layer as a mask, such that a portion of the patterned metal-oxide layer uncovered by the etching stop layer has greater conductivity than conductivity of another portion of the patterned metal-oxide layer covered by the etching stop layer. The patterned metal-oxide layer treated by the surface treatment includes a pixel electrode and an active layer located above the gate. A source and a drain are then formed. And then, an organic electro-luminescence layer and a top electrode are sequentially formed on the pixel electrode.
1. A fabricating method of an organic electro-luminescence display unit, comprising:
forming a gate on a substrate;
forming a gate insulating layer on the substrate to cover the gate;
forming a patterned metal-oxide layer on the gate insulating layer;
forming an etching stop layer on a portion of the patterned metal-oxide layer;
perfonning a surface treatment on the patterned metal-oxide layer with use of the etching stop layer as a mask, such that conductivity of a portion of the patterned metal-oxide layer uncovered by the etching stop layer is greater than conductivity of the a portion of the patterned metal-oxide layer covered by the etching stop layer, wherein the patterned metal-oxide layer treated by the surface treatment comprises a pixel electrode and an active layer located above the gate insulation layer;
forming a source and a drain, wherein the source and the drain are electrically connected to a portion of the active layer uncovered by the etching stop layer, and the drain is electrically connected to the pixel electrode;
forming an organic electro-luminescence layer on the pixel electrode; and
forming a top electrode on the organic electro-luminescence layer.
2. The fabricating method as claimed in claim 1 , wherein the surface treatment comprises a plasma surface treatment.