Vertical channel transistor with self-aligned gate electrode and method for fabricating the same
A method for fabricating vertical channel transistors includes forming a plurality of pillars which have laterally opposing both sidewalls, over a substrate; forming a gate dielectric layer on both sidewalls of the pillars; forming first gate electrodes which cover any one sidewalls of the pillars and shield gate electrodes which cover the other sidewalls of the pillars and have a height lower than the first gate electrodes, over the gate dielectric layer; and forming second gate electrodes which are connected with upper portions of sidewalls of the first gate electrodes.
1. Vertical channel transistors comprising:
a plurality of pillars vertically formed over a substrate and having laterally opposing both sidewalls;
a gate dielectric layer formed on both sidewalls of the pillars;
first gate electrodes formed on any one sidewalls of the pillars over the gate dielectric layer;
second gate electrodes, wherein each of the second gate electrodes is connected with an upper portion of a corresponding first gate electrode; and
shield gate electrodes formed on the other sidewalls of the pillars and having a height lower than the first gate electrodes.
2. The vertical channel transistors according to claim 1 , wherein the first gate electrodes have a line-shaped vertical gate structure which extends in a first direction, and the second gate electrodes have a shape which extends in the same direction as the first gate electrodes.
3. The vertical channel transistors according to claim 1 , wherein the first gate electrodes comprises a titanium nitride layer, and the second gate electrodes comprises a tungsten layer.
4. A semiconductor device comprising:
vertical channel transistors including a plurality of pillars which are formed on a substrate and have laterally opposing both sidewalls, a gate dielectric layer which is formed on both sidewalls of the pillars, and vertical gate electrodes which are formed on any one sidewalls of the pillars over the gate dielectric layer;
capacitors including storage nodes which are connected with top portions of the pillars;
buried bit lines connected with bottom portions of the pillars; and
shield gate electrodes formed on the other sidewalls of the pillars and having a height lower than the first gate electrodes.
5. The semiconductor device according to claim 4 , wherein the vertical gate electrodes comprise:
first gate electrodes formed on any one sidewalls of the pillars; and
second gate electrodes, wherein each of the second gate electrode is connected with an upper portion of a corresponding first gate electrode.
6. The semiconductor device according to claim 4 , wherein the first gate electrodes have a line-shaped vertical gate structure which extends in a first direction, and the second gate electrodes have a shape which extends in the same direction as the first gate electrodes.