Semiconductor storage device

1. A semiconductor memory device comprising:

a memory region including an array of memory cells connected via selection lines;

a voltage generating circuit; and

a control circuit that feeds a voltage generated by the voltage generating circuit to the memory region via selection lines;

the voltage generating circuit including:

a transistor with a gate electrode, a first terminal, and a second terminal, the transistor having a power supply voltage applied to the first terminal;

a first resistance element with a first and a second end, the first resistance element connected on the first end to the second terminal of the transistor;

a second resistance element with a third and a fourth end, the third end being connected to the second end of the first resistance element and the fourth end being connected to a ground potential; and

a comparator, having an inverted input terminal to which a reference potential is input and a non-inverted input terminal connected to a node between the second end of the first resistance element and the third end of the second resistance element, and configured to compare the reference potential with a potential at the node,

the first resistance element and the second resistance element each comprising first and second conductive lines electrically interconnected by a U-shaped connector that is electrically connected to the first conductive line, a second conductive portion that is electrically connected to the second conductive line, and a third conductive portion that connects the first and second conductive portions.

2. The semiconductor memory device of claim 1 , wherein the selection lines comprise bit lines, word lines, and source lines.

3. The semiconductor memory device of claim 2 , wherein the first and second conductive lines have the same line width as the bit lines.

4. The semiconductor memory device of claim 1 , wherein the first and second conductive lines are formed into loop structures, such that each end of the conductive lines are adjacent to one another.

5. The semiconductor memory device of claim 1 , wherein the first and second resistance elements, each further comprise a plurality of conductive lines electrically connected in a zigzag pattern.

6. A method of fabricating a semiconductor device that includes a substrate, a memory region formed on the substrate, and peripheral circuits for supplying voltages to the memory region formed on the substrate, the peripheral circuits comprising one or more resistance elements, said method comprising a process of forming the resistance elements by:

forming a first conductive line in a plane parallel with the substrate;

forming a second conductive line in the plane of the first conductive line, the first and the second conductive lines being substantially parallel to each other;

forming contact plugs on each end of the first and second conductive lines, such that a first contact plug is formed on one end of the first conductive line and a second contact plug is formed on one end of the second conductive line; and

forming a contact wiring element, which bridges the first and second contact plug such that electrical connection is made between the first and second conductive lines,

wherein the other end of the first conductive line is connected to a third conductive line that is substantially parallel to the first conductive line, and the other end of the second conductive line is connected to a fourth conductive line that is substantially parallel to the second conductive line.

7. The method of claim 6 , wherein the first and the second conductive lines are formed using a thinning sidewall method.

8. The method of claim 6 , wherein the first and the second conductive lines are formed at the same time.

9. The method of claim 6 , wherein the first and the second conductive lines have the same line width.

10. The method of claim 6 , wherein the first and second conductive lines are formed in a layer above the contact wiring element.

11. The method of claim 6 , wherein the first and second conductive lines, the contact plugs, and the contact wiring element form a zig-zag shaped conductive path.

12. The method of claim 6 , wherein the third and fourth conductive lines are U-shaped.

13. The method of claim 12 , wherein the first to the fourth conductive lines are formed on the substrate via an insulating film.

14. A semiconductor memory device comprising:

a memory region including an array of memory cells connected via selection lines;

a first resistance element having first and second ends, and comprising first and second conductive lines disposed in a common plane and electrically interconnected by a U-shaped connector;

a second resistance element having third and fourth ends, and comprising third and fourth conductive lines disposed in a common plane and electrically interconnected by a U-shaped connector;

a first conductive portion that projects out of the common plane and is electrically connected to the first end of the first resistance element;

a second conductive portion that projects out of the common plane and electrically connected to the second end of the second resistance element; and

a third conductive portion that connects the first and second conductive portions.

15. The semiconductor memory device according to claim 14 , wherein the first and the second conductive lines have a same line width.

16. The semiconductor memory device of claim 14 , wherein the first and second conductive lines comprise polysilicon.

17. The semiconductor memory e device of claim 14 , wherein the first and second resistance elements are positioned on an insulating film.

18. The semiconductor memory device of claim 16 , wherein the first and second resistance elements are positioned on an insulating film.