Semiconductor devices with active semiconductor height variation
A semiconductor product has different active thicknesses of silicon on a single semiconductor substrate. The thickness of the silicon layer is changed either by selectively adding silicon or subtracting silicon from an original layer of silicon. The different active thicknesses are suitable for use in different types of devices, such as diodes and transistors.
1. A semiconductor product, comprising:
a semiconductor layer consisting essentially of silicon or silicon germanium with different active thicknesses on a single substrate;
the semiconductor layer comprising a first active region having a first thickness no greater than an initial thickness and a second active region having a second thickness greater than the initial thickness; and
the second active region being formed from a portion of the semiconductor layer to which silicon has been added.
2. The semiconductor product of claim 1 , wherein the second active region is formed by selective epitaxial growth of silicon on a portion of the semiconductor layer.
3. The semiconductor product of claim 1 , wherein a diode is formed on at least a portion of the second active region.
4. The semiconductor product of claim 1 , wherein a transistor is formed on at least a portion of the first active region.
5. The semiconductor product of claim 1 , wherein a first type of device is formed on at least a portion of the first active region and a second type of device is formed on at least a portion of the second active region.
6. The semiconductor product of claim 5 , wherein the first type of device is a transistor and the second type of device is a diode.
7. A non-volatile computer-readable memory used to direct a computer to form a semiconductor layer with different active thicknesses on a single substrate by:
providing a mask layer on a semiconductor layer consisting essentially of silicon or silicon germanium, the semiconductor layer having a first thickness;
creating an opening in the mask layer to expose a region of the semiconductor layer; and
increasing the thickness of the semiconductor layer at the exposed region to a second thickness greater than the first thickness.
8. The non-volatile computer-readable memory of claim 7 used to direct a computer to form the semiconductor layer with different active thicknesses by further removing the mask layer after increasing the thickness of the semiconductor layer at the exposed region.
9. The non-volatile computer-readable memory of claim 7 used to direct a computer to form the semiconductor layer with different active thicknesses by further forming a diode on a region of the semiconductor layer having the second thickness.
10. The non-volatile computer-readable memory of claim 9 used to direct a computer to form the semiconductor layer with different active thicknesses by further removing the mask layer after increasing the thickness of the semiconductor layer at the exposed region.
11. The non-volatile computer-readable memory of claim 10 used to direct a computer to form the semiconductor layer with different active thicknesses by further forming a transistor on a region of the semiconductor layer having a thickness no greater than the first thickness.
12. The non-volatile computer-readable memory of claim 7 used to direct a computer to form the semiconductor layer with different active thicknesses by further forming a transistor on a region of the semiconductor layer having a thickness no greater than the first thickness.
13. The non-volatile computer-readable memory of claim 12 used to direct a computer to form the semiconductor layer with different active thicknesses by further removing the mask layer after increasing the thickness of the semiconductor layer at the exposed region.
14. The non-volatile computer readable memory of claim 7 used to direct a computer to form the semiconductor layer with different active thicknesses by further forming a first type of device on a region of the semiconductor layer having a thickness no greater than the first thickness and forming a second type of device on a region of the semiconductor layer having the second thickness, wherein the first type of device is a transistor and the second type of device is a diode.
15. The non-volatile computer readable memory of claim 7 used to direct a computer to form the semiconductor layer with different active thicknesses by increasing the thickness of the semiconductor layer at the exposed region to a second thickness greater than the first thickness by selective epitaxial growth.