A polishing pad generates very few scratches on a surface of a polishing object, and is excellent in planarization property. The polishing pad has a high polishing rate and is excellent in planarization property. The polishing pad grooves become very little clogged with abrasive grains or polishing swarf during polishing and, even when continuously used for a long period of time, the polishing rate is scarcely reduced.
1. A polishing pad comprising a polyurethane resin foam having a fine cell, and containing a polishing layer having a depression and protrusion structure on a polishing surface, wherein the polyurethane resin foam has an Askar D hardness of 45 to 55 degree, a specific gravity of 0.8 to 0.86, and a tensile breaking extension of 120 to 150%,
wherein the polyurethane resin foam is a reaction cured body of an isocyanate-terminal prepolymer A, an isocyanate-terminal prepolymer B and a chain extender the isocyanate-terminal prepolymer A comprising a polyol A having a number average molecular weight of 500 to 650 and an isocyanate component, the isocyanate-terminal prepolymer B comprising a polyol B having a number average molecular weight of 900 to 1500 and an isocyanate component, a content ratio of the polyols (polyol A/polyol B) being 20/80˜35/65 (wt %), and an average NCO wt % of each of the isocyanate-terminal prepolymers A and B being 9.8 to 10.5% by weight.
2. The polishing pad according to claim 1 , wherein the polyurethane resin foam has a tensile strength of 15 to 25 MPa.
3. The polishing pad according to claim 1 , wherein the chain extender is aromatic diamine.
4. The polishing pad according to claim 3 , wherein the aromatic diamine is 3,5-bis(methylthio)-2,4-toluenediamine and/or 3,5-bis(methylthio)-2,6-toluenediamine.
5. The polishing pad according to claim 1 , wherein the isocyanate component is aromatic diisocyanate and cycloaliphatic diisocyanate.
6. The polishing pad according to claim 5 , wherein the aromatic diisocyanate is toluene diisocyanate, and the cycloaliphatic diisocyanate is dicyclohexylmethane diisocyanate.
7. The polishing pad according to claim 1 , wherein the polyurethane resin foam contains a silicone-based nonionic surfactant having no hydroxy group at 0.05 to 10% by weight.
8. The polishing pad according to claim 1 , wherein a dressing speed is 5 to 10 μm/min.