Chemically-sensitive field effect transistor based pixel array with protection diodes
View Patent ↗Methods and apparatus relating to FET arrays for monitoring chemical and/or biological reactions such as nucleic acid sequencing-by-synthesis reactions. Some methods provided herein relate to improving signal (and also signal to noise ratio) from released hydrogen ions during nucleic acid sequencing reactions.
1. A chemically-sensitive field effect transistor (chemFET), comprising:
a substrate including a semiconductor well, wherein the semiconductor well has a conductivity type opposite that of the substrate;
a gate dielectric on the semiconductor well;
a floating gate structure disposed over the gate dielectric;
a passivation layer over the floating gate structure;
a first diode connected between the floating gate structure and the semiconductor well, wherein the semiconductor body is a semiconductor well in a region of substrate having a conductivity type opposite that of the semiconductor body; and
a second diode connected between the floating gate structure and the semiconductor well in a region of substrate having a conductivity type opposite that of the semiconductor body.
2. The chemFET of claim 1 , wherein the diode has a cathode connected to the semiconductor well, and the semiconductor well has n-type conductivity.
3. The chemFET of claim 1 , wherein the first diode has a cathode connected to the semiconductor well, and the semiconductor well has n-type conductivity, and the second diode has an anode connected to the substrate.
4. The chemFET of claim 1 , wherein the floating gate structure comprises a gate element on the gate dielectric, and a plurality of patterned conductors in respective patterned conductor layers connected together and to the gate element by interlayer connectors, the plurality of patterned conductors including a sensor plate.
5. The chemFET of claim 1 , further comprising a source and a drain in the semiconductor well.
6. The chemFET of claim 1 , further comprising a chemical sample well coupled to the passivation layer.
7. The chemFET of claim 1 , wherein the chemFET produces an output indicating an ion-concentration in an analyte solution coupled to the floating gate structure via the passivation layer.
8. An apparatus, comprising:
an array of chemically-sensitive field effect transistors (chemFETs) on a substrate including a plurality of semiconductor body regions, a chemFET in the array disposed in one of the plurality of semiconductor body regions, and including a floating gate structure having a sensor plate, a passivation layer over the sensor plate, and a first diode connected between the floating gate structure and the one of the plurality of semiconductor body regions, wherein the substrate comprises a semiconductor having a conductivity type opposite that of the plurality of semiconductor body regions, and the plurality of semiconductor body regions formed by wells in the substrate, and including a second diode connected between the floating gate and the substrate.
9. The apparatus of claim 8 , wherein the first diode has a cathode connected to the one of the plurality of semiconductor body regions.
10. The apparatus of claim 8 , wherein the diode has a cathode connected to the well forming the one of the plurality of semiconductor body regions, the well having an n-type conductivity, and the second diode has an anode connected to the substrate.
11. The apparatus of claim 8 , wherein the floating gate structure in the chemFET comprises a gate element on the gate dielectric, and a plurality of patterned conductors in respective patterned conductor layers connected together and to the gate element by interlayer connectors, the plurality of patterned conductors including a sensor plate.
12. The apparatus of claim 8 , the chemFET including a source and a drain in the semiconductor body.
13. The apparatus of claim 8 , including an array of chemical sample wells coupled to the passivation layers of chemFETs in the array of chemFETs.
14. The apparatus of claim 8 , wherein the chemFETs in the array produce outputs indicating an ion-concentration in an analyte solution coupled to the floating gate structures.
15. The apparatus of claim 14 , further comprising circuitry coupled to the array to read the outputs of the chemFETs.