Method for manufacture of semiconductor bearing thin film material
View Patent ↗A method for forming a semiconductor bearing thin film material. The method includes providing a metal precursor and a chalcogene precursor. The method forms a mixture of material comprising the metal precursor, the chalcogene precursor and a solvent material. The mixture of material is deposited overlying a surface region of a substrate member. In a specific embodiment, the method maintains the substrate member including the mixture of material in an inert environment and subjects the mixture of material to a first thermal process to cause a reaction between the metal precursor and the chalcogene material to form a semiconductor metal chalcogenide bearing material overlying the substrate member. The method then performs a second thermal process to remove any residual solvent and forms a substantially pure semiconductor metal chalcogenide thin film material overlying the substrate member.
1. A method for forming semiconductor bearing thin film material, the method comprising:
providing a metal precursor;
providing a chalcogene precursor;
forming a mixture of material comprising the metal precursor, the chalcogene precursor and a solvent material;
depositing the mixture of material overlying a surface region of a substrate member,
maintaining the substrate member including the mixture of material in an inert environment;
subjecting the deposited mixture of material to a first thermal process to form a semiconductor metal chalcogenide bearing thin film material overlying the surface region of the substrate member; and
subsequently subjecting the semiconductor metal chalcogenide bearing thin film material to a second thermal process to form a substantially pure semiconductor thin film material.
2. The method of claim 1 wherein the metal precursor comprises a transition metal, a Group III material, or a Group IV material.
3. The method of claim 1 wherein the metal precursor is selected from a zinc precursor, a copper precursor, a cadmium precursor, an iron precursor, or a tin precursor.
4. The method of claim 1 wherein the chalcogene precursor is selected from an oxygen precursor, a sulfur precursor, or a selenium precursor.
5. The method of claim 1 wherein the solvent material is selected from the group consisting of ethanol, methoxyethanol, tetrahydrofuran, glycols such as ethylene glycol.
6. The method of claim 1 wherein the first thermal process is provided at a temperature ranging from about 80 Degree Celsius to about 90 Degree Celsius.
7. The method of claim 1 wherein the inert environment is provided using nitrogen, argon, or helium.
8. The method of claim 1 wherein the second thermal process is provided at a temperature at about 300 Degree Celsius and higher.
9. The method of claim 1 wherein the depositing step comprises a solution deposition process including a spin on process, a doctor blade process, a dip coating process, a spraying process, an screen printing process, or an inkjet process.
10. The method of claim 1 wherein the substrate member is a transparent substrate.
11. The method of claim 1 wherein the transparent substrate is selected from glass, fused silica, and quartz.
12. The method of claim 1 wherein the substrate member is a metal.
13. The method of claim 12 wherein the substrate member is a metal selected from stainless steel, aluminum, and nickel.
14. The method of claim 1 wherein the substrate member is a semiconductor material selected from silicon, silicon germanium, germanium, II-VI compound semiconductors, III-V compound semiconductors, and silicon on insulator.
15. The method of claim 1 wherein the substrate member is a multilayer material.
16. The method of claim 1 wherein the substrate member is a polymer.
17. The method of claim 1 wherein the metal precursor is a zinc precursor and the chalcogene precursor is a sulfur precursor.
18. The method of claim 17 wherein the zinc precursor is selected from zinc acetate, zinc methacrylate, zinc acrylate, zinc acetylacetonate, zinc chloride, and zinc nitrate.
19. The method of claim 17 wherein the sulfur precursor is selected from thiourea, thiols, thioethers, thioaceamides, and thiosulfates.
20. The method of claim 17 further comprises;
forming a mixture of material comprising the zinc precursor, the sulfur precursor, and a solvent material;
depositing the mixture of material overlying a surface region of a substrate member,
maintaining the substrate member including the mixture of material in an inert environment;
subjecting the first mixture of material to a first thermal process to form a zinc sulfide bearing thin film material overlying the surface region of the substrate member; and
subjecting the zinc sulfide bearing thin film material to a second thermal process to form a substantially pure zinc sulfide thin film material overlying the surface region of the substrate member.
21. The method of claim 20 wherein the solvent material is selected from alcohols such as ethanol, methoxyethanol, tetrahydrofuran, glycols such as ethylene glycol.
22. The method of claim 20 wherein the first thermal process is provided at a temperature ranging from about 80 Degree Celsius to about 90 Degree Celsius.
23. The method of claim 20 wherein the inert environment is provided using nitrogen, argon, or helium.
24. The method of claim 20 wherein the second thermal process is provided at a temperature higher than about 300 Degree Celsius.
25. The method of claim 20 wherein the zinc sulfide material is characterized by a bandgap of about 3.5 eV to about 3.7 eV.