Semiconductor device and method of manufacturing semiconductor device
View Patent ↗The semiconductor device includes a silicon substrate having a channel region, a gate electrode formed over the channel region, buried semiconductor regions formed in a surface of the silicon substrate on both sides of the gate electrode, for applying to the surface of the silicon substrate a first stress in a first direction parallel to the surface of the silicon substrate, and stressor films formed on the silicon substrate between the channel region and the buried semiconductor regions in contact with the silicon substrate, for applying to the silicon substrate a second stress in a second direction which is opposite to the first direction.
1. A method of manufacturing a semiconductor device comprising: forming a gate electrode over a n-type channel region of a silicon substrate; forming a first sidewall insulating film on a side wall of the gate electrode; forming p-type source/drain regions in the silicon substrate on both sides of the gate electrode; forming a first semiconductor layer of a first semiconductor material for applying a first stress in a first direction parallel to a surface of the silicon substrate on the silicon substrate in a region where the silicon substrate is not covered by the gate electrode and the first sidewall insulating film; forming a second sidewall insulating film on the side wall of the gate electrode with the first sidewall insulating film formed on; etching the first semiconductor layer and the silicon substrate with the gate electrode, the first sidewall insulating film and the second sidewall insulating film as the mask to thereby remove the first semiconductor layer in a region where the second sidewall insulating film is not formed and form a trench in the silicon substrate, leaving a portion of the first semiconductor layer under the second sidewall insulating film; and burying in the trench a second semiconductor layer of a second semiconductor material for applying to the silicon substrate a second stress in a second direction opposite to the first direction, wherein a lattice constant of the first semiconductor material is smaller than a lattice constant of silicon, a lattice constant of the second semiconductor material is larger than the lattice constant of silicon, and
the n-type channel region is compressed by the first stress and the second stress.
2. The method of manufacturing a semiconductor device according to claim 1 , further comprising:
after burying the second semiconductor layer, forming a metal silicide film on the second semiconductor layer.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein
the second semiconductor material is SiGe.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein
the first semiconductor material is SiC.
5. The method of manufacturing a semiconductor device according to claim 3 , wherein
a composition ratio of germanium in the SiGe is 15%-25%.
6. The method of manufacturing a semiconductor device according to claim 4 , wherein
a composition ratio of carbon in the SiC is 1%-3%.
7. A method of manufacturing a semiconductor device comprising: forming a gate electrode over a n-type channel region of a silicon substrate; forming a first sidewall insulating film on a side wall of the gate electrode; forming p-type source/drain regions in the silicon substrate on both sides of the gate electrode; forming a first semiconductor layer of a first semiconductor for applying a tensile stress to a portion of the silicon substrate in contact with the first semiconductor layer, forming a second sidewall insulating film on the side wall of the gate electrode with the first sidewall insulating film formed on; etching the first semiconductor layer and the silicon substrate with the gate electrode, the first sidewall insulating film and the second sidewall insulating film as the mask to thereby remove the first semiconductor layer in a region where the second sidewall insulating film is not formed and form a trench in the silicon substrate, leaving a portion of the first semiconductor layer under the second sidewall insulating film; and burying in the trench a second semiconductor layer of a first semiconductor for applying a compressive stress to a portion of the silicon substrate in contact with the buried semiconductor regions, wherein a lattice constant of the first semiconductor material is smaller than a lattice constant of silicon, a lattice constant of the second semiconductor material is larger than the lattice constant of silicon, and the n-type channel region is compressed by the tensile stress and the compressive stress.
8. A method of manufacturing a semiconductor device comprising: forming a first gate electrode over a p-type well region of a silicon substrate and a second gate electrode over a n-type well region of the silicon substrate; forming a first sidewall insulating film on a side wall of the first gate electrode and a second sidewall insulating film on a side wall of the second gate electrode; forming n-type source/drain regions in the p-type well region on both sides of the first gate electrode; forming p-type source/drain regions in the n-type well region on both sides of the second gate electrode; forming first trenches in the n-type source/drain regions by etching the silicon substrate with the first gate electrode and the first sidewall insulating film as a mask;
forming a first semiconductor material in the first trenches and on the p-type source/drain regions, to form first semiconductor layers in the first trenches and second semiconductor layers on the p-type source/drain regions for applying a first stress;
forming a third sidewall insulating film on the first sidewall insulating film formed on and a fourth sidewall insulating film on a side wall of the second gate electrode with the second sidewall insulating film formed on;
etching, in the n-type well region, the second semiconductor layers and the silicon substrate with the second gate electrode and the fourth sidewall insulating film as a mask, to form second trenches in the p-type source/drain regions and leave a portion of the second semiconductor layers under the fourth sidewall insulating film;
forming a second semiconductor material in the second trenches, to form third semiconductor layers in the second trenches for applying a second stress,
wherein a lattice constant of the first semiconductor material is smaller than a lattice constant of silicon,
a lattice constant of the second semiconductor material is larger than the lattice constant of silicon.