Integrated circuit with sensor and method of manufacturing such an integrated circuit
View Patent ↗An integrated circuit package for an integrated circuit having one or more sensor elements in a sensor element area of the circuit. An encapsulation covers bond wires but leaves an opening over the sensor element area. A protection layer is provided over the integrated circuit over which the encapsulation extends, and it has a channel around the sensor element area to act as a trap for any encapsulation material which has crept into the opening area.
1. An integrated circuit package, comprising:
an integrated circuit having at least one sensor element in a sensor element area of the circuit;
a carrier on which the integrated circuit is mounted;
a plurality of bond wires between the integrated circuit and the carrier;
an encapsulation which covers the bond wires and which leaves an opening over the sensor element area,
wherein a protection layer is provided over the integrated circuit over which the encapsulation extends, wherein the protection layer comprises a channel around the sensor element area, which lies inside the opening of the encapsulation; and
wherein the protection layer directly covers the at least one sensor element.
2. A package as claimed in claim 1 , wherein the channel extends fully through the protection layer.
3. A package as claimed in claim 1 , wherein each said sensor element which is covered by the protection layer comprises a protection layer pad over the sensor element surrounded by a pad channel.
4. A package as claimed in claim 3 , wherein the pad channel extends fully through the protection layer.
5. A package as claimed in claim 1 , wherein the protection layer comprises polyimide.
6. A package as claimed in claim 1 , wherein the sensor element comprises a humidity sensor.
7. A package as claimed in claim 1 , wherein the sensor element comprises an ambient light sensor.
8. A package as claimed in claim 1 , wherein the channel comprises a closed shape surrounding the sensor element area.
9. A method of forming an integrated circuit package, comprising:
providing an integrated circuit having at least one sensor element in a sensor element area of the circuit;
mounting the integrated circuit on a carrier;
forming a plurality of bond wires between the integrated circuit and the carrier;
forming an encapsulation layer to cover the bond wires and leave an opening over the sensor element area;
forming a protection layer over the integrated circuit before mounting on the carrier; and
forming a channel in the protection layer around the sensor element area,
and wherein the forming of the encapsulation layer comprises molding the encapsulation layer up to a barrier formed as part of a mold, with the channel on an inner side of the barrier.
10. A method as claimed in claim 9 , wherein the encapsulation layer molding comprises film assisted molding.
11. A method as claimed in claim 9 , further comprising forming the channel fully through the protection layer.
12. A method as claimed in of claim 9 , further comprising covering the sensor element with the protection layer.
13. A method as claimed in claim 12 , comprising, for each sensor element which is covered by the protection layer, forming a protection layer pad over the sensor element surrounded by a pad channel.
14. A method as claimed in of claim 9 , wherein the protection layer comprises polyimide.