Fabrication of low defectivity electrochromic devices
View Patent ↗Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition.
1. A method of fabricating an electrochromic device, the method comprising, in the following order:
a. depositing a first portion of a metal oxide layer;
b. lithiating the first portion of the metal oxide layer with elemental lithium; and then
c. depositing a second portion of the metal oxide layer on the first portion of the metal oxide laver.
2. The method of claim 1 , wherein the metal oxide layer is a counter electrode layer of the electrochromic device.
3. The method of claim 2 , wherein the metal oxide layer comprises nickel tungsten oxide.
4. The method of claim 1 , wherein the metal oxide layer is an electrochromic layer of the electrochromic device.
5. The method of claim 1 , further comprising depositing a transparent conducting layer on the second portion of the metal oxide layer.
6. The method of claim 5 , wherein the transparent conducting layer comprises indium tin oxide.
7. The method of claim 1 , wherein b. is performed via direct current (DC) sputtering.
8. The method of claim 1 , wherein b. is performed at a pressure of between about 1 mTorr and about 20 mTorr.
9. The method of claim 1 , wherein b is performed at a power density of between about 1 Watts/cm 2 and about 10 Watts/cm 2 .
10. The method of claim 1 , further comprising:
d. lithiating the second portion of the metal oxide layer with elemental lithium; and
e. depositing a third portion of the metal oxide layer on the second portion of the metal oxide layer.
11. The method of claim 1 , wherein the metal oxide layer is a counter electrode layer of the electrochromic device, and wherein the metal oxide layer comprises nickel tungsten oxide doped with tantalum.
12. The method of claim 1 , wherein lithiating the first portion with elemental lithium comprises providing elemental lithium to the first portion of the metal oxide layer disposed on a substrate in a substantially vertical orientation.
13. The method of claim 1 , wherein the metal oxide layer comprises at least one oxide selected from a group consisting of: nickel oxide, nickel tungsten oxide, nickel vanadium oxide, nickel chromium oxide, nickel aluminum oxide, nickel manganese oxide, nickel magnesium oxide, chromium oxide, manganese oxide, Prussian blue, cerium titanium oxide (CeO 2 —TiO 2 ), cerium zirconium oxide (CeO 2 —ZrO 2 ), vanadium oxide (V 2 O 5 ), nickel tungsten oxide doped with tantalum and a mixture thereof.
14. The method of claim 1 , wherein the metal oxide layer is an ion conducting layer of the electrochromic device.
15. The method claim 1 , further comprising depositing an ion conducting layer of the electrochromic device on the second portion of the metal oxide layer.
16. An electrochromic device comprising a metal oxide layer formed, in the following order:
a. depositing a first portion of the metal oxide layer;
b. lithiating the first portion with elemental lithium; and then
c. depositing a second portion of the metal oxide layer on the first portion of the metal oxide layer.
17. The electrochromic device of claim 16 , wherein the metal oxide layer is a counter electrode layer of the electrochromic device.
18. The electrochromic device of claim 17 , wherein the metal oxide layer comprises nickel tungsten oxide.
19. The electrochromic device of claim 16 , wherein the metal oxide layer is an electrochromic layer of the electrochromic device.
20. The electrochromic device of claim 16 , further comprising a transparent conductive oxide deposited on the second portion.
21. The electrochromic device of claim 20 , wherein the transparent conductive oxide comprises indium tin oxide.
22. The electrochromic device of claim 19 , further comprising a counter electrode layer.
23. The electrochromic device of claim 16 , wherein the metal oxide layer is a counter electrode layer of the electrochromic device, and wherein the metal oxide layer comprises nickel tungsten oxide doped with tantalum.
24. The electrochromic device of claim 16 , wherein the metal oxide layer comprises at least one oxide selected from a group consisting of: nickel oxide, nickel tungsten oxide, nickel vanadium oxide, nickel chromium oxide, nickel aluminum oxide, nickel manganese oxide, nickel magnesium oxide, chromium oxide, manganese oxide, Prussian blue, cerium titanium oxide (CeO 2 —TiO 2 ), cerium zirconium oxide (CeO 2 —ZrO 2 ), vanadium oxide (V 2 O 5 ), nickel tungsten oxide doped with tantalum and a mixture thereof.
25. The electrochromic device of claim 16 , wherein the metal oxide layer is an ion conducting layer of the electrochromic device.